Measuring the ion current in high-density plasmas using radio-frequency current and voltage measurements

Journal of Applied Physics

Volumn 90, Issue 6, 2001, Pages 2660-2671

  Sobolewski, Mark A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035883868     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1390491     Document Type: Article

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