Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor

Plasma Sources Science and Technology

Volumn 15, Issue 4, 2006, Pages 889-899

  Miller, Paul A ^a   Barnat, Edward V ^a   Hebner, Gregory A ^a   Paterson, Alex M ^b   Holland, John P ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC REACTORS; MAGNETIC FIELDS; PLASMA INTERACTIONS; PLASMA SHEATHS; SURFACE WAVES; WAVE PROPAGATION;

CAPACITIVELY COUPLED PLASMA REACTORS; EXCITATION CIRCUITS; PLASMA CURRENTS; PLASMA PROCESSING CHAMBERS;

PLASMA FLOW;

EID: 33750599441     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/4/036     Document Type: Article

References (21)

1. Stevens J E, Sowa M J and Cecchi J L 1996 J. Vac. Sci. Technol. A 14 139-43
2. Sansonnens L, Pletzer A, Magni D, Howling A A, Hollenstein Ch and Schmitt J P M 1997 Plasma Sources Sci. Technol. 6 170-8
3. Colgan M J, Meyyappan M and Murnick D E 1994 Plasma Sources Sci. Technol. 3 181-9
4. Lieberman M A, Booth J P, Chabert P, Rax J M and Turner M M 2002 Plasma Sources Sci. Technol. 11 283-93
5. Chabert P, Raimbault J L, Rax J M and Lieberman M A 2004 Phys. Plasmas 11 1775-85
6. Perret A, Chabert P, Booth J-P, Jolly J, Guillon J and Auvray Ph 2003 Appl. Phys. Lett. 83 243-5
7. Sansonnens L and Scmitt J 2003 Appl. Phys. Lett. 82 182-4
8. Chabert P, Raimbault J-L, Rax J-L and Perrat A 2004 Phys. Plasmas 11 4081-7
9. Riley M E 1995 Unified model of the rf plasma sheath Technical Report SAND95-0775 UC-401 (Sandia National Laboratories)
10. Riley M E 1996 Unified model of the rf plasma sheath part II-asymptotic connection formulae Technical Report SAND96-1948 UC-401 (Sandia National Laboratories)
11. Miller P A and Riley M E 1997 J. Appl. Phys. 82 3689-709
12. Bose D, Govindan T R and Meyyappan M 2000 J. Appl. Phys. 87 7176-84
13. Loveberg R H 1969 Magnetic probes Plasma Diagnostic Techniques ed R H Huddlestone and S L Leonard (New York: Academic) p 69-112
14. Piejak R, Godyak V and Alexandrovich B 1997 J. Appl. Phys. 81 3416-21
15. Piejak R, Godyak V and Alexandrovich B 2001 Rev. Sci. Instrum. 72 4002-4
16. Hebner G A, Barnat E V, Miller P A, Paterson A M, Holland J P and Lill T 2004 AVS 51st Int. Symp. (Anaheim, CA, 14-19 November 2004) paper PS-WeA2 submitted
17. Miller P A 1991 Proc. SPIE 1594 179-88
18. Miller P A, Anderson H and Splichal M P 1992 J. Appl. Phys. 71 1171-6
19. Berry L, Maynard H, Miller P, Moore T, Pendley M, Resta V, Sparks D and Yang Q 2000 J. Vac. Sci. Technol. A 18 2806-14
20. Miller P A and Greenberg K E 1992 Appl. Phys. Lett. 60 2859-61
21. Miller P A, Romero L A and Pochan P D 1993 Phys. Rev. Lett. 71 863-6