Transient RF self-bias in electropositive and electronegative plasmas

Journal of Physics D: Applied Physics

Volumn 36, Issue 22, 2003, Pages 2837-2844

  Braithwaite, N St J ^a,b   Sheridan, T E ^a,c   Boswell, R W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b OPEN UNIVERSITY   (United Kingdom)

^c OHIO NORTHERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BESSEL FUNCTIONS; ELECTRIC SPACE CHARGE; HYDROGEN; MATHEMATICAL MODELS; PLASMA SHEATHS; SULFUR COMPOUNDS;

ELECTRONEGATIVE PLASMA; ELECTROPOSITIVE PLASMA; SULFUR HEXAFLUORIDE; TRANSIENT SELF-BIASING;

PLASMAS;

EID: 0344084190     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/22/011     Document Type: Article

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