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Volumn 18, Issue 1, 2009, Pages

Edge-to-center plasma density ratio in high density plasma sources

Author keywords

[No Author keywords available]

Indexed keywords

COLLISIONLESS; ENERGY BALANCE EQUATIONS; GLOBAL MODELS; HIGH DENSITY PLASMAS; ION FLUXES; LANGMUIR; LINEARLY PROPORTIONALS; LOW PRESSURES; LOW-TEMPERATURE PLASMAS; NEUTRAL GAS; NEUTRAL GAS PRESSURES; PLASMA PRESSURES; PLASMA TRANSPORTS; PRESSURE RANGES; SHEATH EDGES;

EID: 65549136711     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/18/1/014017     Document Type: Article
Times cited : (22)

References (20)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.