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Volumn 18, Issue 1, 2009, Pages
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Edge-to-center plasma density ratio in high density plasma sources
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Author keywords
[No Author keywords available]
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Indexed keywords
COLLISIONLESS;
ENERGY BALANCE EQUATIONS;
GLOBAL MODELS;
HIGH DENSITY PLASMAS;
ION FLUXES;
LANGMUIR;
LINEARLY PROPORTIONALS;
LOW PRESSURES;
LOW-TEMPERATURE PLASMAS;
NEUTRAL GAS;
NEUTRAL GAS PRESSURES;
PLASMA PRESSURES;
PLASMA TRANSPORTS;
PRESSURE RANGES;
SHEATH EDGES;
GASES;
IONS;
PERMITTIVITY;
PLASMA DENSITY;
PLASMA DIAGNOSTICS;
PLASMA JETS;
PLASMA SHEATHS;
PLASMA SOURCES;
ELECTRIC DISCHARGES;
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EID: 65549136711
PISSN: 09630252
EISSN: 13616595
Source Type: Journal
DOI: 10.1088/0963-0252/18/1/014017 Document Type: Article |
Times cited : (22)
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References (20)
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