Experimental setup and electrical characteristics of an inductively coupled plasma

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 703-712

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODYNAMICS; ELECTROMAGNETIC FIELDS; ELECTRONS; HALL EFFECT; PLASMA DENSITY; PLASMA DIAGNOSTICS; PLASMA SHEATHS; PRESSURE; SKIN EFFECT;

ELECTRON ENERGY DISTRIBUTION FUNCTION; INDUCTIVELY COUPLED PLASMAS; INDUCTOR COIL; LANGMUIR PROBES; MAGNETIC PROBES;

PLASMAS;

EID: 0033554954     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369150     Document Type: Article

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