Enhancement of ohmic and stochastic heating by resonance effects in capacitive radio frequency discharges: A theoretical approach

Physical Review Letters

Volumn 101, Issue 8, 2008, Pages

  Mussenbrock, T ^a   Brinkmann, R P ^a   Lieberman, M A ^b   Lichtenberg, A J ^b   Kawamura, E ^b  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE (FLUID MECHANICS); DYNAMICS; ELECTRIC DISCHARGES; MAGNETIC FIELD EFFECTS; MAGNETOHYDRODYNAMICS; PLASMA DIAGNOSTICS; PLASMA HEATING; PLASMA SHEATHS; PLASMAS; RADIO WAVES; RESONANCE; STOCHASTIC MODELS; STOCHASTIC PROGRAMMING;

BACKGROUND GASES; CAPACITIVE DISCHARGES; ELECTRON HEATING; GLOBAL MODELING; NON-LINEAR INTERACTIONS; OHMIC HEATING; PLASMA BULK; PLASMA DYNAMICS; RADIO FREQUENCY DISCHARGES; RESONANCE EFFECTS; SELF-EXCITATION; SERIES RESONANCE; STOCHASTIC HEATING;

HEATING;

EID: 43149125444     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.101.085004     Document Type: Article

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