Ion flux nonuniformities in large-area high-frequency capacitive discharges

Applied Physics Letters

Volumn 83, Issue 2, 2003, Pages 243-245

  Perret, A ^a   Chabert, P ^a   Booth, J P ^a   Jolly, J ^a   Guillon, J ^a   Auvray, Ph ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; IONS; PLASMA APPLICATIONS;

ION FLUX;

ELECTRIC DISCHARGES;

EID: 0042769375     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1592617     Document Type: Article

References (12)

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