Electromagnetic effects in high-frequency capacitive discharges used for plasma processing

Journal of Physics D: Applied Physics

Volumn 40, Issue 3, 2007, Pages

  Chabert, P ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC FIELDS; FLAT PANEL DISPLAYS; NATURAL FREQUENCIES; PLASMA APPLICATIONS;

CAPACITIVE DISCHARGES; CONTEMPORARY REACTORS; EXCITATION WAVELENGTH;

ELECTRIC DISCHARGES;

EID: 33947636102     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/3/R01     Document Type: Review

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