Negative power absorption in inductively coupled plasma

Physical Review Letters

Volumn 79, Issue 23, 1997, Pages 4589-4592

  Godyak, V A ^a   Kolobov, V I ^b  

^a OSRAM SYLVANIA   (United States)

^b UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; CURRENT DENSITY; ELECTRIC VARIABLES MEASUREMENT; ELECTRON TRANSPORT PROPERTIES; FOURIER TRANSFORMS; PLASMAS; PROBES; SKIN EFFECT;

FOURIER METHOD; INDUCTIVELY COUPLED PLASMA; MAXWELL-BOLTZMANN EQUATIONS; NEGATIVE POWER ABSORPTION;

ELECTROMAGNETIC WAVE ABSORPTION;

EID: 0031560345     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.79.4589     Document Type: Article

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