Suppression of the standing wave effect in high frequency capacitive discharges using a shaped electrode and a dielectric lens: Self-consistent approach

Physics of Plasmas

Volumn 11, Issue 8, 2004, Pages 4081-4087

  Chabert, P ^a   Raimbault, J L ^a   Rax, J M ^a   Perret, A ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRIC EXCITATION; ELECTRIC POTENTIAL; ELECTRODES; FREQUENCIES; LENSES; PLASMA DEVICES;

DIELECTRIC LENS; PARALLEL PLATE ELECTRODES; STANDING WAVE EFFECT; VOLTAGE DROP;

WAVE EFFECTS;

EID: 4344589997     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1770900     Document Type: Article

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