Nonequilibrium EEDF in gas discharge plasmas

IEEE Transactions on Plasma Science

Volumn 34, Issue 3 PART 2, 2006, Pages 755-766

  Godyak, Valery A ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

Electron energy distribution function (EEDF); Electron kinetics; Gas discharge; Nonequilibrium

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); ELECTRON ENERGY DISTRIBUTIONS; ELECTRON KINETICS; GAS DISCHARGE; GAS PRESSURES; GAS-DISCHARGE PLASMAS; NON LOCALITIES; NON-EQUILIBRIUM CONDITIONS; NON-EQUILIBRIUM EFFECTS; NONEQUILIBRIUM; RADIO-FREQUENCY DISCHARGES;

DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC POWER DISTRIBUTION; ELECTROMAGNETIC FIELD EFFECTS; ELECTROMAGNETIC FIELDS; ELECTRON ENERGY ANALYZERS; ELECTRON ENERGY LEVELS; ELECTRONS; GAS DISCHARGE TUBES; GASES; GLOW DISCHARGES; ION BEAMS; PLASMA THEORY;

ELECTRON TEMPERATURE;

EID: 34547898766     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.875847     Document Type: Conference Paper

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