Ion energy uniformity in high-frequency capacitive discharges

Applied Physics Letters

Volumn 86, Issue 2, 2005, Pages

  Perret, A ^a   Chabert, P ^a   Jolly, J ^a   Booth, J P ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTROMAGNETISM; ETCHING; IONS; MICROELECTRONICS; PRESSURE EFFECTS; THIN FILMS;

CAPACITIVE DISCHARGES; DRIVING FREQUENCY; ENERGY DISTRIBUTION; ION ENERGY;

FREQUENCIES;

EID: 19744382874     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1848183     Document Type: Article

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