Sheath reversal during transient radio-frequency bias

IEEE Transactions on Plasma Science

Volumn 30, Issue 1 I, 2002, Pages 148-149

  Barroy, Pierre René Jean ^a   Goodyear, Alec ^a   Braithwaite, Nicholas St J ^a  

^a OPEN UNIVERSITY   (United Kingdom)

Author keywords

2 D profiles; Plasma diagnostics; RF plasmas

Indexed keywords

DIGITAL IMAGE STORAGE; ELECTRIC POTENTIAL; GROUNDING ELECTRODES; INDUCTIVELY COUPLED PLASMA; PERTURBATION TECHNIQUES; PLASMA DIAGNOSTICS; PROBES;

OPTICAL EMISSION; RADIO FREQUENCY (RF) PLASMAS;

PLASMA SHEATHS;

EID: 0036478217     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.1003967     Document Type: Article

References (2)

1. The gaseous electronics RF reference cell: A defined parallel-plate system for experimental and theoretical studies of plasma-processing discharges
2. A novel electrostatic probe method for ion flux measurements