Tailoring of electron energy distributions in low temperature plasmas

Plasma Sources Science and Technology

Volumn 7, Issue 4, 1998, Pages 471-477

  Haas, F A ^a   Goodyear, A ^a   Braithwaite, N St J ^a  

^a OPEN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRONS; PLASMA SIMULATION; PLASMAS; PROBABILITY DENSITY FUNCTION; PROBABILITY DISTRIBUTIONS;

ELECTRON ENERGY DISTRIBUTION; ELECTRON TEMPERATURE;

PLASMA DENSITY;

EID: 0032206416     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/4/005     Document Type: Article

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