Inductively coupled plasmas: Optimizing the inductive-coupling efficiency for large-area source design

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 2, 2005, Pages 270-277

  Colpo, P ^a   Meziani, T ^a   Rossi, F ^a  

^a JOINT RESEARCH CENTRE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; DIELECTRIC DEVICES; ETCHING; FREQUENCIES; OPTIMIZATION; PLASMA DENSITY; PLASMA SOURCES;

COIL ANTENNA; GAS DISTRIUBUTION;

INDUCTIVELY COUPLED PLASMA;

EID: 31144462586     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1854695     Document Type: Article

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