Transitions and scaling laws for electronegative discharge models

Plasma Sources Science and Technology

Volumn 9, Issue 1, 2000, Pages 45-56

  Lichtenberg, A J ^a   Lieberman, M A ^a   Kouznetsov, I G ^a   Chung, T H ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Dong A University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRONS; IONS; MATHEMATICAL MODELS;

ELECTRONEGATIVE DISCHARGE MODELS; SCALING LAWS;

PLASMA SOURCES;

EID: 0033887581     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/1/308     Document Type: Article

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