Electron heating mechanisms in dual-frequency capacitive discharges

Plasma Sources Science and Technology

Volumn 16, Issue 2, 2007, Pages 364-371

  Turner, M M ^a   Chabert, P ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; JOULE HEATING; PLASMA HEATING;

COLLISIONLESS HEATING; DUAL-FREQUENCY CAPACITIVE DISCHARGES; ELECTRON HEATING; SUPERPOSITION;

ELECTRIC DISCHARGES;

EID: 34247494245     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/2/020     Document Type: Article

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