Electron heating mode transitions in dual frequency capacitive discharges

Applied Physics Letters

Volumn 89, Issue 23, 2006, Pages

  Turner, M M ^a   Chabert, P ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; NATURAL FREQUENCIES; PARAMETER ESTIMATION;

CAPACITIVE DISCHARGES; COLLISIONLESS ELECTRON HEATING; ELECTRON HEATING; FREQUENCY CAPACITIVE DISCHARGES;

ELECTRON TRANSITIONS;

EID: 33845396953     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2402226     Document Type: Article

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