Electromagnetic field nonuniformities in large area, high-frequency capacitive plasma reactors, including electrode asymmetry effects

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 302-313

  Sansonnens, L ^a   Howling, A A ^a   Hollenstein, Ch ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC REACTORS; ELECTRODES; ELECTROMAGNETIC FIELDS; ELECTROMAGNETIC WAVE PROPAGATION;

ELECTROMAGNETIC WAVEFIELD; PLASMA PERMITTIVITY; PLASMA REACTORS; PLASMA SLABS;

PLASMA DEVICES;

EID: 33745603794     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/002     Document Type: Article

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