Collisionless electron heating by capacitive rf sheaths

Physical Review Letters

Volumn 87, Issue 13, 2001, Pages

  Gozadinos, G ^a   Turner, M M ^a   Vender, D ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRONS; HEAT FLUX; MATHEMATICAL MODELS; PLASMA COLLISION PROCESSES; PLASMA HEATING; PLASMA OSCILLATIONS; TEMPERATURE; THERMODYNAMIC PROPERTIES;

COLLISIONLESS ELECTRON HEATING; ELECTRON INELASTIC COLLISION; HIGH-FREQUENCY PLASMA DISCHARGES; PARTICLE-IN-CELL SIMULATION; VLASOV EQUATION;

PLASMA SHEATHS;

EID: 31044436681     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.87.135004     Document Type: Article

References (17)

1. M. A. Lieberman and V. A. Godyak: IEEE Trans. Plasma Sci.: 26, 955 (1998).
2. E. Fermi: Phys. Rev.: 75, 1169 (1949).
3. H. M. Mayer, in Proceedings of the VIth International Conference on Ionization Phenomena in Gases, 1963 (Sponsored by International Union of Pure and Applied Physics, Paris, 1964), Vol. 4, pp. 129–134.
4. V. A. Godyak: Sov. Phys. Tech. Phys.: 16, 1073 (1972).
5. G. Gozadinos, D. Vender, M. M. Turner, and M. A. Lieberman: Plasma Sources Sci. Technol.: 10, 117 (2001).
6. M. A. Lieberman: IEEE Trans. Plasma Sci.: 16, 638 (1988).
7. V. A. Godyak: Sov. J. Plasma Phys.: 2, 78 (1976).
8. M. M. Turner: Phys. Rev. Lett.: 75, 1312 (1995).
9. M. Surendra and M. Dalvie: Phys. Rev. E: 48, 3914 (1993).
10. M. M. Turner, D. A. W. Hutchinson, R. A. Doyle, and M. B. Hopkins: Phys. Rev. Lett.: 76, 2069 (1996).
11. M. Surendra and D. B. Graves: Phys. Rev. Lett.: 66, 1469 (1991).
12. I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin: Appl. Phys. Lett.: 69, 3818 (1996).
13. G. Gozadinos, D. Vender, and M. M. Turner: J. Comput. Phys.: 172, 348 (2001).
14. C. K. Birdsall and A. B. Langdon, Plasma Physics via Computer Simulation (Adam Hilger, Bristol, 1991).
15. M. Surendra and D. Vender: Appl. Phys. Lett.: 65, 153 (1994).
16. D. Vender and R. W. Boswell: J. Vac. Sci. Technol. A: 10, 1331 (1992).
17. G. W. Hammett and F. W. Perkins: Phys. Rev. Lett.: 64, 3019 (1990).