Hairpin resonator probe measurements in RF plasmas

Plasma Sources Science and Technology

Volumn 14, Issue 4, 2005, Pages 734-743

  Piejak, R B ^a   Al Kuzee, J ^a   Braithwaite, N St J ^a  

^a OPEN UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; MICROWAVES; NATURAL FREQUENCIES; PLASMAS; TEMPERATURE DISTRIBUTION;

COUPLED PROBE; CURRENT COLLECTION; HAIRPIN RESONATOR; MICROWAVE RESONATORS;

RESONATORS;

EID: 27744597302     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/4/012     Document Type: Article

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