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Volumn 93, Issue 10 1, 2003, Pages 5888-5892
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Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITANCE;
ELECTRIC FIELD EFFECTS;
ELECTRIC POTENTIAL;
ELECTRODES;
FREQUENCY MODULATION;
PLASMA SHEATHS;
SPECTROSCOPIC ANALYSIS;
RADIO FREQUENCY (RF);
PLASMAS;
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EID: 0038312137
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1568158 Document Type: Article |
Times cited : (8)
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References (15)
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