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Volumn 93, Issue 10 1, 2003, Pages 5888-5892

Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; ELECTRODES; FREQUENCY MODULATION; PLASMA SHEATHS; SPECTROSCOPIC ANALYSIS;

EID: 0038312137     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1568158     Document Type: Article
Times cited : (8)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.