Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

Journal of Physics D: Applied Physics

Volumn 41, Issue 10, 2008, Pages

  Schulze, J ^a   Donko Z ^b   Heil, B G ^a   Luggenholscher D ^a   Mussenbrock, T ^a   Brinkmann, R P ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; EMISSION SPECTROSCOPY; EXCITATION ENERGY; PLASMA SHEATHS;

ELECTRIC FIELD REVERSALS; ELECTRON INERTIA; FREQUENCY DISCHARGES; SHEATH COLLAPSE;

ELECTRIC DISCHARGES;

EID: 43049103095     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/10/105214     Document Type: Article

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