Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma

Plasma Sources Science and Technology

Volumn 16, Issue 1, 2007, Pages 193-199

  Shimada, Masashi ^a   Tynan, George R ^a   Cattolica, Robert ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS HEATING; INDUCTIVELY COUPLED PLASMA; PRESSURE EFFECTS; PRESSURE MEASUREMENT;

ELECTRON PRESSURE; PLASMA PRESSURE; THERMAL TRANSPIRATION;

DENSITY OF GASES;

EID: 33947694729     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/1/024     Document Type: Conference Paper

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