Helicons-the past decade

IEEE Transactions on Plasma Science

Volumn 25, Issue 6, 1997, Pages 1245-1257

  Chen, Francis F ^a   Boswell, Rod W ^a  

^a University of California   (United States)

Author keywords

Helicon; Plasma discharges; Plasma processing; Plasma source; Plasma waves

Indexed keywords

ELECTROMAGNETIC DISPERSION; IONIZATION OF GASES; MATHEMATICAL MODELS; PLASMA SOURCES; PLASMA WAVES;

PLASMA PROCESSING;

HELICONS;

EID: 0031372788     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.650899     Document Type: Article

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