Plasma-aided fabrication in Si-based photovoltaic applications: An overview

Journal of Physics D: Applied Physics

Volumn 44, Issue 17, 2011, Pages

  Xiao, S Q ^a   Xu, S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPETITIVE ADVANTAGE; CURRENT STATUS; FREE SURFACES; N-TYPE CONDUCTIVITY; P-N JUNCTION; PHOTOVOLTAIC APPLICATIONS; PHOTOVOLTAIC INDUSTRY; PLASMA PHYSICS; PLASMA PROCESS; PLASMA TECHNOLOGY; SI SUBSTRATES; SI-BASED; SI-BASED SOLAR CELLS; SILICATE GLASS; TEXTURIZATION; WAFER CLEANING;

COMPETITION; FABRICATION; PHOSPHORUS; PHOTOVOLTAIC EFFECTS; PLASMA ETCHING; PLASMAS; SEMICONDUCTOR JUNCTIONS; SILICATES; SILICON; SILICON NITRIDE; SILICON WAFERS; SOLAR CELLS; SOLAR POWER GENERATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79954582414     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/17/174033     Document Type: Article

References (150)

1. Chapin D M, Fuller C S and Pearson G L 1954 J. Appl. Phys. 25 676
2. Green M A et al 2001 Prog. Photovolt. Res. Appl. 9 49
3. Schmidt W and Woesten B 2000 Proc. 16th European PV Solar Energy Conf. (Glasgow, UK) p 1083
4. Carlson D E and Wronski C R 1976 Appl. Phys. Lett. 28 671
5. Meier J et al 1994 Appl. Phys. Lett. 65 860
6. Mai Y, Klein S, Carius R, Stiebig H, Geng X and Finger F 2005 Appl. Phys. Lett. 87 073503
7. Yamamoto K et al 2006 Proc. 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion (Hawaii) vol 1-2 pp 1489-92
8. Meier J et al 2001 Sol. Energy Mater. Sol. Cells 66 73
9. Taguchi M, Tanaka M, Matsuyama T, Matsuoka T, Tsuda S, Nakano S, Kishi Y and Kuwano 1990 Technical Digest of the International PVSEC-5 (Kyoto, Japan) pp 689-92
10. Taguchi M, Tsunomura Y, Inoue H, Taira S, Nakashima T, Baba T, Sakata H and Maruyama E 2009 Proc. 24th European Photovoltaic Solar Energy Conf. (Hamburg) pp 1690-3
11. Nakajima A et al 2004 Proc. 19th European Photovoltaic Solar Energy Conf. (Paris, France) pp 1567-70
12. Muller J et al 2001 Sol. Energy Mater. Sol. Cells 66 275
13. Roschek T, Repmann T, Muller J, Rech B and Wagner H 2002 J. Vac. Sci. Technol. A 20 492
14. Vetterl O, Finger F, Carius R, Hapke P, Houben L, Kluth O, Lambertz A, Muck A, Rech B and Wagner H 2000 Sol. Energy Mater. Sol. Cells 62 97
15. Meier J et al 1998 Mater. Res. Soc. Symp. Proc. 507 139-44
16. Myong S Y, Sriprapha K, Yashiki Y, MIyajima S, Yamada A and Konagai M 2008 Sol. Energy Mater. Sol. Cells 92 639
17. Hofmann M, Rentsch J and Preu R 2010 Eur. Phys. J. Appl. Phys. 52 11101
18. Leem J W, Song Y M, Lee Y T and Yu J S 2010 Appl. Phys. B 100 891
19. Parm I O, Kim K, Lim D G, Lee J H, Heo J H, Kim J, Kim D S, Lee S H and Yi J 2002 Sol. Energy Mater. Sol. Cells 74 97
20. Leguijt C, Lolgen P, Eikelboom J A, Weeber A W, Schuurmans F M, Snike W C, Alkemade P F A, Sarro P M, Maree C H M and Verhoef L A 1996 Sol. Energy Mater. Sol. Cells 40 297
21. Lauinger T, Moschner J, Aberle A G and Hezel R 1998 J. Vac. Sci. Technol. A 16 530
22. Xu M, Xu S, Chai J W, Long J D and Ee Y C 2006 Appl. Phys. Lett. 89 251904
23. Nositschka W A, Voigt O, Kenanoglu A, Borchert D and Kurz H 2003 Prog. Photovolt. Res. Appl. 11 445
24. Tucci M, Salurso E, Roca F and Palma F 2002 Thin Solid Films 403-404 307
25. Forster C, Schnabel F, Weih P, Stauden T, Ambacher O and Pezoldt J 2004 Thin Solid Films 455-456 695
26. Momonoi Y, Yokogawa K and Izawa M 2004 J. Vac. Sci. Technol. B 22 268
27. Strass A, Hansch W, Bieringer P, Neubecker A, Kaesen F, Fischer A and Eisele I 1997 Surf. Coat. Technol. 97 158
28. Zaidi S H, Ruby D S and Gee J M 2001 IEEE Trans. Electron Devices 48 1200
29. Yoo J, Kim K, Thamilselvan M, Lakshminarayan N, Kim Y K, Lee J, Yoo K J and Yi J 2008 J. Phys. D: Appl. Phys. 41 125205
30. Nagayoshi H, Konno K, Nishimura S and Terashima K 2005 Japan. J. Appl. Phys. 44 7839
31. Arai T and Shirai H 1996 J. Appl. Phys. 80 4976
32. Fukuda Y, Sakuma Y, Fukai C, Fujimura Y, Azuma K and Shirai H 2001 Thin Solid Films 386 256
33. Das C, Dasgupta A, Saha S C and Ray S 2002 J. Appl. Phys. 91 9401
34. Droz C, Sauvain E V, Bailat J, Feitknecht L, Meier J and Shah A 2004 Sol. Energy Mater. Sol. Cells 81 61
35. Niikura C, Kondo M and Matsuda A 2004 J. Non-Cryst. Solids 338-340 42
36. Smets A H M, Matsui T and Kondo M 2008 J. Appl. Phys. 104 034508
37. Kosku N and Miyazaki S 2006 J. Non-Cryst. Solids 352 911
38. Li J, Wang J, Yin M, Gao P, He D, Chen Q, Li Y and Shirai H 2008 J. Appl. Phys. 103 043505
39. Cheng Q, Xu S, Huang S and Ostrikov K 2009 Cryst. Growth Des. 9 2863
40. Xiao S Q, Xu S, Wei D Y, Huang S Y, Zhou H P and Xu Y 2010 J. Appl. Phys. 108 113520
41. Makabe T and Petrovic Z 2006 Plasma Electronics (London: Taylor and Francis)
42. Boyd T J M and Sanderson J J 2008 The Physics of Plasmas (Cambridge: Cambridge University Press)
43. Horvath P and Gallagher A 2009 J. Appl. Phys. 105 013304
44. Amanatides E, Hammad A, Katsia E and Mataras D 2005 J. Appl. Phys. 97 073303
45. Sriraman S, Agarwal S, Aydil E S and Maroudas D 2002 Nature 418 62
46. Klein S, Finger F, Carius R and Stutzmann M 2005 J. Appl. Phys. 98 024905
47. Denysenko I B, Ostrikov K, Xu S, Yu M Y and Diong C H 2003 J. Appl. Phys. 94 6097
48. 1996 Database Needs for Modeling and Simulation of Plasma Processing (Washington: National Research Council) ISBN-10: 0-309-05591-1
49. Doyle J R, Doughty D A and Gallagher A 1992 J. Appl. Phys. 71 4771
50. Kae-Nune P, Perrin J, Guillon J and Jolly J 1995 Plasma Sources Sci. Technol. 4 250
51. Rukevych P P, Ostrikov K, Xu S and Vladimirov S V 2004 J. Appl. Phys. 96 4421
52. Ostrikov K 2005 Rev. Mod. Phys. 77 489
53. Levchenko I, Rider A E and Ostrikov K 2007 Appl. Phys. Lett. 90 193110
54. Ostrikov K 2008 Vacuum 83 4
55. Ostrikov K, Levchenko I and Xu S 2008 Pure Appl. Chem. 80 1909
56. Arulsamy A D and Ostrikov K 2009 Phys. Lett. A 373 2267
57. Ostrikov K N, Xu S and Shafiul Azam A B M 2002 J. Vac. Sci. Technol. A 20 251
58. Hammad A, Amanatides E, Rapakoulias D E and Mataras D 2001 J. Phys. IV 11 Pr3-779
59. Feitknecht L, Meier J, Torres P, Zurcher J and Shah A 2002 Sol. Energy Mater. Sol. Cells 74 539
60. Gao Y T, Zhang X D, Zhao Y, Sun H, Feng Z and Wei C C 2006 Acta Phys. Sin. 55 1497
61. Heintze M, Zedlitz R and Bauer G H 1993 J. Phys. D: Appl. Phys. 26 1781
62. van den Donker M N, Rech B, Kessels W M M and van de Sanden M C M 2007 New J. Phys. 9 280
63. Matsuda A 1997 Plasma Phys. Control. Fusion 39 431
64. Morral A F I, Cabarrocas P R I and Clerc C 2004 Phys. Rev. B 69 125307
65. Huang R, Lin X Y, Yu Y P, Lin K X, Zhu Z S, Wei J H and Chen K J 2006 J. Phys. D: Appl. Phys. 39 4423
66. Ostrikov K N, Denysenko I B, Tsakadze E L, Xu S and Storer R G 2002 J. Appl. Phys. 92 4935
67. Bauer S, Schroeder B, Herbst W and Lill M 1998 Proc. 2nd WCPVSEC (Vienna) p 363
68. Meier J, Spitznagel J, Kroll U, Bucher C, Fay S, Moriarty T and Shah A 2003 Proc. 3rd World Conf. on Photovoltaic Energy Conversion (Osaka) vol A-C pp 2801-5
69. Staebler D L and Wronski C R 1977 Appl. Phys. Lett. 31 292
70. Shah A V, Meier J, Vallat-Sauvain E, Wyrsch N, Kroll U, Droz C and Graf U 2003 Sol. Energy Mater. Sol. Cells 78 469
71. Takatsuka H, Yamauchi Y, Takeuchi Y, Fukagawa M, Kawamura K, Goya S and Takano A 2006 Proc. 4th World Conf. on Photovoltaic Energy Conversion Hawaii vol 1-2 pp 2028-33
72. Yamamoto K et al 2005 Prog. Photovolt. Res. Appl. 13 489
73. Mai Y, Klein S, Carius R, Wolff J, Lambertz A, Finger F and Geng X 2005 J. Appl. Phys. 97 114913
74. Kondo M, Fukawa M, Guo L and Matsuda A 2000 J. Non-Cryst. Solids 266-269 84
75. Kosku N and Miyazaki S 2006 Thin Solid Films 511-512 265
76. Kosku N, Kurisu F, Takegoshi M, Takahashi H and Miyazaki S 2003 Thin Solid Films 435 39
77. Cheng Q J, Xu S and Ostrikov K 2009 Nanotechnology 20 215606
78. Cheng Q J, Xu S and Ostrikov K 2009 J. Mater. Chem. 19 5134
79. Xu S, Ostrikov K N, Li Y, Tsakadze E L and Jones I R 2001 Phys. Plasmas 8 2549
80. Ostrikov K N, Xu S and Yu M Y 2000 J. Appl. Phys. 88 2268
81. Tsakadze Z L, Levchenko L, Ostrikov K and Xu S 2007 Carbon 45 2022
82. Denysenko I B, Xu S, Long J D, Rutkevych P P, Ostrikov K and Azarenkov N A 2004 J. Appl. Phys. 95 2713
83. Moon B Y, Youn J H, Won S H and Jang J 2001 Sol. Energy Mater. Sol. Cells 69 139
84. Goto M, Toyoda H, Kitagawa M, Hirao T and Sugai H 1996 Japan. J. Appl. Phys. 35 L1009
85. Soppe W J, Duijvelaar B G and Schiermeier S E A 2000 Proc. 16th European PVSEC (Glasgow, UK) pp 1420-3
86. Duerinckx F and Szlufcik J 2002 Sol. Energy Mater. Sol. Cells 72 231
87. Kerr M J J, Cuevas A and Bultman J H 2001 J. Appl. Phys. 89 3821
88. Kerr M J J and Cuevas A 2002 Semicond. Sci. Technol. 17 166
89. Schmidt J and Aberle A G 1997 J. Appl. Phys. 81 6186
90. Mackel H and Ludemann R 2002 J. Appl. Phys. 92 2602
91. Moschner J D, Henze J, Schmidt J and Hezel R 2004 Prog. Photovolt. 12 21
92. Pierson H O 1996 Processing of refractory carbides and nitrides (coatings) Handbook of Refractory Carbides and Nitrides (Westwood, NJ: Noyes Publications) p 290 chapter 15
93. Luque A and Hegedus S 2003 Crystalline silicon solar cells and modules Handbook of Photovoltaic Science and Engineering (New York: Wiley) p 284 chapter 7
94. Vetterl O, Hapke P, Houben L, Finger F, Carius R and Wagner H 1999 J. Appl. Phys. 85 2991
95. Boland J J 1993 Adv. Phys. 42 129
96. Oura K, Lifshits V G, Saranin A A, Zotov A V and Katayama M 1999 Surf. Sci. Rep. 35 1
97. Dinger A, Lutterloh C and Kuppers J 2001 J. Chem. Phys. 114 5338
98. Niwano M, Terashi M and Kuge J 1999 Surf. Sci. 420 6
99. Suet Z, Paul D J, Zhang J and Turner S G 2007 Appl. Phys. Lett. 90 203501
100. Vengurlekar A, Ashok S, Kalnas C E and Theodore N D 2004 Appl. Phys. Lett. 85 4052
101. Zhou H P, Xu L X, Xu S, Huang S Y, Wei D Y, Xiao S Q, Yan W S and Xu M 2010 J. Phys. D: Appl. Phys. 43 505402
102. Simoen E, Huang Y L, Ma Y, Lauwaert J, Clauws P, Rafi J M, Ulyashin A and Clayes C 2009 J. Electrochem. Soc. 156 H434
103. Huang Y L, Ma Y, Job R and Ulyashin A G 2004 J. Appl. Phys. 96 7080
104. Simoen E, Claeys C, Raff J M and Ulyashin A G 2006 Mater. Sci. Eng. B 134 189
105. Ulyashin A G, Bunmay Y A, Job R and Fahrner W R 1998 Appl. Phys. A 66 399
106. Chiang C-M, Gates S M, Szetsen Lee S, Kong M and Bent S F 1997 J. Phys. Chem. B 101 9537
107. Pankove J I, Magee C W and Wance R O 1985 Appl. Phys. Lett. 47 748
108. Nickel N H, Anderson G B, Johnson N M and Walker J 1999 Physica B 273-274 212
109. Nickel N H, Jackson W B and Walker J 1996 Phys. Rev. B 53 7750
110. Veprek S and Sarott F A 1982 Plasma Chem. Plasma Process. 2 233
111. Bai X D, Xu Z, Liu S and Wang E G 2005 Sci. Technol. Adv. Mater. 6 804
112. Seeger K and Palmer R E 1999 Appl. Phys. Lett. 74 1627
113. Tada T, Kanayama T, Koga K, Weibel P, Carroll S J, Seeger K and Palmer R E 1998 J. Phys. D: Appl. Phys. 31 L21
114. Hsu C H, Lo H C, Chen C F, Wu C T, Hwang J S, Das D, Tsai J, Chen L C and Chen K H 2004 Nano Lett. 4 471
115. Yang M C, Shieh J, Hsu C C and Cheng T C 2005 Electrochem. Solid State Lett. 8 C131
116. Ostrikov K and Xu S 2007 Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly (Weinheim: Wiely-VCH) ISBN 978-3-527-40633-3
117. Ostrikov K and Murphy A B 2007 J. Phys. D: Appl. Phys. 40 2223
118. Rsu S H, Yang C, Yoo W J, Kim D H and Kim T 2009 J. Korean Phys. Soc. 54 1016
119. Moreno M, Daineka D and Cabarrocas P R I 2010 Sol. Energy Mater. Sol. Cells 94 733
120. Yoo J S, Parm I O, Gangopadhyay U, Kim K, Dhungel S K, Mangalaraj D and Yi J 2006 Sol. Energy Mater. Sol. Cells 90 3085
121. Ma L L, Zhou Y C, Jiang N, Lu X, Shao J, Lu W, Ge J, Ding X M and Hou X Y 2006 Appl. Phys. Lett. 88 171907
122. Koynov S, Brandt M S and Stutzmann M 2006 Appl. Phys. Lett. 88 203107
123. Jia Y et al 2008 Adv. Mater. 20 4594
124. Yuan H C, Yost V E, Page M R, Stradins P, Meier D L and Branz H M 2009 Appl. Phys. Lett. 95 123501
125. Garnett E and Yang P 2010 Nano Lett. 10 1082
126. Lee W H, Lin J C, Lee C, Cheng H C and Yew T R 2001 Diamond Relat. Mater. 10 2075
127. Jansen H, de Boer M, Wensink H, Kloeck B and Elwenspoek M 2001 J. Microelectron 32 769
128. Dhamrin M, Ghazali N H, Jeon M S, Saitoh T and Kamisako K 2006 Conf. Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion (Hawaii) vol 1-2 pp 1395-8
129. Xu S, Levchenko I, Huang S Y and Ostrikov K 2009 Appl. Phys. Lett. 95 111505
130. Levchenko I, Huang S Y, Ostrikov K and Xu S 2010 Nanotechnology 21 025605
131. Zinchuk O, Drozdov N, Fedotov A, Mazanik A, Krekotsen N, Ukhov V, Partyka J, Wegierek P and Koltunowicz K 2009 Vacuum 83 s99
132. Popov V P, Tyschenko I E, Safronov L N, Naumova O V, Antonova I V, Gutakovsky A K and Talochkin A B 2002 Thin Solid Films 403-404 500
133. Barakel D, Ulyashin A, Perichaud I and Martinuzzi S 2002 Sol. Energy Mater. Sol. Cells 72 285
134. Yamaguchi T, Taylor S J, Watanabe S, Ando K, Yamaguchi M, Hisamatsu T and Matsuda S 1998 Appl. Phys. Lett. 72 1226
135. Buzynin A, Luk'yanov A, Osiko V and Voronkov V 2002 Nucl. Instrum. Methods Phys. Res. B 186 366
136. Wolkenstein T 1973 Physico-Chimie de la Surface des Semiconducteurs (Moscow: MIR)
137. Götz W, Pensl G and Zulehner W 1992 Phys. Rev. B 46 4312
138. Newman R C, Ashwin M J, Pritchard R E and Tucker J H 1998 Phys. Status Solidi 210 519
139. De'ak P, Snyder L L, Lindstrom J L, Corbett J W, Pearton S J and Tanvendale A J 1988 Phys. Lett. A 126 427
140. Newman R C, Tucker J H, Brown A R and McQuaid S A 1991 J. Appl. Phys. 70 3061
141. Agostinelli G, Dekkers H F W, De Wolf S and Beaucarne G 2004 19th EU PVSEC (Paris, France)
142. Rech B, Roschek T, Repmann T, Muller J, Schmitz R and Appenzeller W 2003 Thin Solid Films 427 157
143. Derkacs D, Lim S H, Matheu P, Mar W and Yu E T 2006 Appl. Phys. Lett. 89 093103
144. Yang M D, Liu Y K, Shen J L, Wu C H, Lin C A, Chang W H, Wang H H, Yeh H I, Chan W H and Parak W J 2008 Opt. Express 16 15754
145. Akimov Y A, Ostrikov K and Li E P 2009 Plasmonics 4 107
146. Akimov Y A, Koh W S and Ostrikov K 2009 Opt. Express 17 10195
147. Fawer-Wasswer M 2004 Solar energy-sunny days ahead? Current status and outlook for photovoltaic and solar thermal power Sarasin Sustainable Investment Report
148. Green M A 2004 Sol. Energy 76 3
149. Alsema E A 2000 Prog. Photovolt. 8 17
150. Kayes B M, Atwater H A and Lewis N S 2005 J. Appl. Phys. 97 114302