Surface science of plasma exposed surfaces: A challenge for applied plasma science

Vacuum

Volumn 83, Issue 1, 2008, Pages 4-10

  Ostrikov, K ^a,b,c  

^a UNIVERSITY OF SYDNEY   (Australia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c CSIRO   (Australia)

Author keywords

Adatoms; Low temperature plasmas; Nanofabrication; Nanostructures; Plasma exposed surfaces; Quantum dots; Self organization

Indexed keywords

ATOMIC PHYSICS; ATOMS; ELECTRIC CHARGE; ELECTRIC FIELDS; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; INDUCTANCE; MAGNETISM; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; QUANTUM ELECTRONICS; SEMICONDUCTOR QUANTUM DOTS;

ADATOMS; BUILDING UNITS; DETERMINISTIC APPROACH; HIGH-PRECISION; LOW TEMPERATURES; LOW-TEMPERATURE PLASMA; LOW-TEMPERATURE PLASMAS; NANO ARRAYS; NANO-DEVICES; NANO-DOT ARRAYS; NANO-TOOLS; NANOFABRICATION; NON-EQUILIBRIUM; PLASMA EXPOSED SURFACES; PLASMA SCIENCE; PLASMA-AIDED NANOFABRICATION; POLARIZATION EFFECTS; PROCESS CONDITIONS; QUANTUM DOT; QUANTUM DOTS; SELF-ASSEMBLED NANOSTRUCTURES; SELF-ORGANIZATION; SELF-ORGANIZED GROWTH; SPECIFIC EFFECTS; SURFACE PROCESSING; SURFACE SCIENCES;

PLASMAS;

EID: 49949084271     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.03.051     Document Type: Article

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