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Journal of Chemical Physics

Volumn 114, Issue 12, 2001, Pages 5338-5350

Interaction of hydrogen atoms with Si(111) surfaces: Adsorption, abstraction, and etching

(3) Dinger, A a Lutterloh, C a Kuppers J a,b

a UNIVERSITY OF BAYREUTH (Germany)

b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DECOMPOSITION; DESORPTION; ETCHING; HYDROGEN; SEMICONDUCTING SILICON; SURFACE REACTIONS; THERMODYNAMICS;

HYDROGEN FLUX;

SURFACE CHEMISTRY;

EID: 0035932181 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.1351158 Document Type: Article

Times cited : (47)

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