Reactive plasmas as a versatile nanofabrication tool

Reviews of Modern Physics

Volumn 77, Issue 2, 2005, Pages 489-511

  Ostrikov, K ^a,b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROXYAPATITE; PLASMAS; SEMICONDUCTOR QUANTUM DOTS; SILICON; THERMAL EFFECTS;

HYDROXYAPATITE BIOCERAMICS; NANOASSEMBLY PROCESSES; REACTIVE PLASMAS;

NANOTECHNOLOGY;

EID: 26244451229     PISSN: 00346861     EISSN: 15390756     Source Type: Journal    
DOI: 10.1103/RevModPhys.77.489     Document Type: Article

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