Investigation on the initial growth of nanocrystalline silicon prepared from hydrogen-diluted SiCl4 at low temperatures

Journal of Physics D: Applied Physics

Volumn 39, Issue 20, 2006, Pages 4423-4428

  Huang, Rui ^a,b   Lin, Xuanying ^a   Yu, Yunpeng ^a   Lin, Kuixun ^a   Zhu, Zusong ^a   Wei, Junhong ^a   Chen, Kunji ^b  

^a SHANTOU UNIVERSITY   (China)

^b NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SILICON COMPOUNDS; THERMAL EFFECTS; THIN FILMS;

DEPOSITION PERIOD; INITIAL GROWTH; INSULATOR GLASS SUBSTRATE; NANOCRYSTALLINE SILICON FILMS;

NANOSTRUCTURED MATERIALS;

EID: 33749430805     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/20/019     Document Type: Article

References (39)

1. Gross A, Vetterl O, Lambertz A, Finger F, Wagner H and Dasgupta A 2001 Appl. Phys. Lett. 79 2841
2. Han D, Lorentzen J D, Weinberg-Wolf J, McNeil L E and Wang Q 2003 J. Appl. Phys. 94 2930
3. Bailat J, Vallat-Sauvain E, Feitknecht L, Droz C and Shah A 2003 J. Appl. Phys. 93 5727
4. Ray S, Mukhopadhyay S and Jana T 2006 Sol. Energy Mater. 90 631
5. Grom G F, Lockwood D J, McCaffrey J P, Labbé H J, Fauchet P M, White B Jr, Diener J, Kovalev D, Koch F and Tsybeskov L 2000 Nature (London) 407 358
6. Pavesi L, Dal Negro L, Mazzoleni C, Franzò G and Priolo F 2000 Nature (London) 408 440
7. Park Y-B and Rhee S-W 2001 J. Appl. Phys. 90 217
8. Nguyen H V, An Ilsin, Collins R W, Lu Y, Wakagi M and Wronski C R 1994 Appl. Phys. Lett. 65 3335
9. Tsai C C, Anderson G B, Thompson R and Wacker B 1989 J. Non-Cryst. Solids 114 151
10. Solomon I, Drevillon B, Shirai H and Layadi N 1993 J. Non-Cryst. Solids 164 989
11. Gerbi J E and Abelson J R 2001 J. Appl. Phys. 89 1463
12. Matsuda A 1983 J. Non-Cryst. Solids 59 767
13. Shirai H, Das D, Hanna J and Shimizu I 1991 Appl. Phys. Lett. 59 1096
14. Nakamura K, Yoshino K, Takeoka S and Shimizu I 1995 Japan. J. Appl. Phys. Part 1 34 442
15. Sriraman S, Agarwal S, Aydil E S and Maroudas D 2002 Nature (London) 418 62
16. Roca i Cabarrocas P, Hamma S, Sharma S N, Viera G, Bertran E and Costa J 1998 J. Non-Cryst. Solids 227-230 871
17. Nishiguchi K, Zhao X and Oda S 2002 J. Appl. Phys. 92 2748
18. Bapat A, Perrey C R, Campbell S A, Carter C B and Kortshagen U 2003 J. Appl. Phys. 94 1969
19. Kasouit S, Damon-Lacoste J, Vanderhaghen R and Roca i Cabarrocas P 2004 J. Non-Cryst. Solids 338-340 86
20. Ostrikov K 2005 Rev. Mod. Phys. 77 489
21. Thompson S, Perrey C R, Carter C B, Belich T J, Kakalios J and Kortshagen U 2005 J. Appl. Phys. 97 034310
22. Meaudre M, Meaudre R, Butté R, Vignoli S, Longeaud C, Kleider J P and Roca i Cabarrocas P 1999 J. Appl. Phys. 86 946
23. Viera G, Mikikian M, Bertran E, Roca i Cabarrocas P and Boufendi L 2002 J. Appl. Phys. 92 4684
24. Roca i Cabarrocas P, Chbane N, Kharchenko A V and Tchakarov S 2004 Plasma Phys. Control. Fusion B 46 235
25. Lin X Y, Lin K X, Huang C Q, Yu P Y, Luo Y L, Yu C Y and Huang R 2005 J. Appl. Phys. 98 034907
26. Lin K X, Lin X Y, Yu Y P, Wang H and Chen J Y 1993 J. Appl. Phys. 74 4899
27. Xu G Y, Wang T M and Li G H 2000 Chin. J. Semicond. 21 1170
28. Yue G Z, Lorentzen J D, Lin J and Han D X 1999 Appl. Phys. Lett. 75 492
29. Huang R, Lin X Y, Yu Y P, Lin K X, Zhu Z S and Wei J H 2006 Acta Phys. Sin. 55 2523
30. Platz R and Wagner S 1998 Appl. Phys. Lett. 73 1237
31. Ye Y and Marcus R K 1995 Spectrochim. Acta Part B 50 997
32. Ishihara S, He D and Shimizu I 1994 Japan. J. Appl. Phys. 33 51
33. Kondo M, Toyoshima Y, Matsuda A and Ikuta K 1996 J. Appl. Phys. 80 6061
34. Wong T-C and Wu J-J 2001 Japan. J. Appl. Phys. 40 L1207
35. Matsuda A and Goto T 1989 Mater. Res. Soc. Symp. Proc. 164 3
36. Kasouit S, Kumar S, Vanderhaghen R, Roca i Cabarrocas P and French I 2002 J. Non-Cryst. Solids 299-302 113
37. Humbird D and Graves D B 2004 J. Appl. Phys. 96 791
38. Shen Z, Kim T, Kortshagen U, McMurry P H and Campbell S A 2003 J. Appl. Phys. 94 2277
39. Ikeda T, Osborne I S, Hata N and Matsuda A 1996 J. Non-Cryst. Solids 198-200 987