Structure and hydrogen content of polymorphous silicon thin films studied by spectroscopic ellipsometry and nuclear measurements

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 12, 2004, Pages

  Fontcuberta i Morral, A ^a   Roca i Cabarrocas, P ^a   Clerc, C ^b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; SILICON;

ARTICLE; CHEMICAL STRUCTURE; DENSITY; DIELECTRIC CONSTANT; ELLIPSOMETRY; ENERGY; FILM; HYDROGENATION; METHODOLOGY; POROSITY; SPECTROSCOPY; TEMPERATURE;

EID: 2342468721     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.125307     Document Type: Article

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