Mechanism of hydrogen-induced crystallization of amorphous silicon

Nature

Volumn 418, Issue 6893, 2002, Pages 62-65

  Sriraman, Saravanapriyan ^a   Agarwal, Sumit ^a   Aydil, Eray S ^a   Maroudas, Dimitrios ^a  

^a Santa Barbara   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; COMPUTER SIMULATION; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; HYDROGEN; INFRARED SPECTROSCOPY; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS; NUCLEATION; OPTOELECTRONIC DEVICES; PLASMAS;

PLASMA DEPOSITION;

AMORPHOUS SILICON;

HYDROGEN; NANOPARTICLE; SILICON; SILICON DIOXIDE;

CHEMISTRY; CRYSTALLIZATION; HYDROGEN; SILICON;

ARTICLE; COVALENT BOND; CRYSTALLIZATION; DEVICE; DRY DEPOSITION; FILM; GEOMETRY; HYDROGENATION; INFRARED SPECTROSCOPY; MOLECULAR DYNAMICS; PARTICLE SIZE; PRIORITY JOURNAL; STRUCTURE ANALYSIS;

INSERTION SEQUENCES;

EID: 0037019294     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/nature00866     Document Type: Article

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