Power transfer and mode transitions in low-frequency inductively coupled plasmas

Journal of Applied Physics

Volumn 88, Issue 5, 2000, Pages 2268-2271

  Ostrikov, K N ^b   Xu, S ^c   Yu, M Y ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001031945     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1289055     Document Type: Article

References (20)

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