Microcrystalline silicon solar cells deposited at high rates

Journal of Applied Physics

Volumn 97, Issue 11, 2005, Pages

  Mai, Y ^a,b   Klein, S ^a   Carius, R ^a   Wolff, J ^a   Lambertz, A ^a   Finger, F ^a   Geng, X ^b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b NANKAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION PARAMETERS; ION ENERGIES; MICROCRYSTALLINE SILICON SOLAR CELLS; SILANE CONCENTRATIONS;

CONCENTRATION (PROCESS); CRYSTALLINE MATERIALS; DEPOSITION; OPTICAL PROPERTIES; PARAMETER ESTIMATION; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE EFFECTS; QUANTUM EFFICIENCY; SILICON;

SOLAR CELLS;

EID: 20744459770     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1927689     Document Type: Article

References (37)

1. A. Matsuda, J. Non-Cryst. Solids 59-60, 767 (1983).
2. S. Vepřek, F.-A. Sarrot, S. Rambert, and E. Taglauer, J. Vac. Sci. Technol. A 7, 2614 (1989).
3. M. Kondo, M. Fukawa, L. Guo, and A. Matsuda, J. Non-Cryst. Solids 266-269, 84 (2000).
4. S. Suzuki, M. Kondo, and A. Matsuda, Sol. Energy Mater. Sol. Cells 74, 489 (2002).
5. M. Heintze, R. Zedlitz, and G. H. Bauer, J. Phys. D 26, 1781 (1993).
6. A. A. Howling, J.-L. Dorier, Ch. Hollenstein, U. Kroll, and F. Finger, J. Vac. Sci. Technol. A 10, 1080 (1992).
7. F. Finger, J. Appl. Phys. 71, 5665 (1992).
8. F. Finger, P. Hapke, M. Luysberg, R. Carius, H. Wagner, and M. Scheib, Appl. Phys. Lett. 65, 2588 (1994).
9. H. Keppner, J. Meier, P. Torres, D. Fischer, and A. Shah, Appl. Phys. A: Mater. Sci. Process. 69, 169 (1999).
10. J. K. Olthoff, R. J. Van Brunt, S. B. Radovanov, J. A. Flees, and R. Surowiec, J. Appl. Phys. 75, 115 (1994).
11. L. Guo, M. Kondo, M. Fukawa, K. Saitoh, and A. Matsuda, Jpn. J. Appl. Phys., Part 2 37, L1116 (1998).
12. T. Roschek, T. Repmann, J. Müller, B. Rech, and H. Wagner, J. Vac. Sci. Technol. A 20, 492 (2002).
13. M. Fukawa, S. Suzuki, L. Guo, M. Kondo, and A. Matsuda, Sol. Energy Mater. Sol. Cells 66, 217 (2001).
14. A. Lambertz, O. Vetterl, and F. Finger, Proc. of the 17th European Photovoltaic Solar Energy Conference, Munich, Germany, 22-26 Oct. 2001, edited by, B. McNelis, W. Palz, H. A. Ossenbrink, and, P. Helm, (WIP-Munich & ETA-Florence, 2001), p. 2977.
15. T. Matsui, M. Tsukiji, H. Saika, T. Toyama, and H. Okamoto, Jpn. J. Appl. Phys., Part 1 41, 20 (2002).
16. U. Graf, J. Meier, U. Kroll, J. Bailat, C. Droz, E. Vallat-Sauvain, and A. Shah, Thin Solid Films 427, 37 (2003).
17. Y. Mai, S. Klein, X. Geng, and F. Finger, Appl. Phys. Lett. 85, 2839 (2004).
18. O. Vetterl, Sol. Energy Mater. Sol. Cells 62, 97 (2000).
19. S. Klein, F. Finger, R. Carius, T. Dylla, B. Rech, M. Grimm, L. Houben, and M. Stutzmann, Thin Solid Films 430, 202 (2003).
20. S. Klein, J. Wolff, F. Finger, R. Carius, H. Wagner, and M. Stutzmann, Jpn. J. Appl. Phys., Part 2 41, L10 (2002).
21. O. Kluth, Thin Solid Films 351, 247 (1999).
22. S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981).
23. O. Vetterl, A. Lambertz, A. Dasgupta, F. Finger, B. Rech, O. Kluth, and H. Wagner, Sol. Energy Mater. Sol. Cells 66, 345 (2001).
24. T. Brammer and H. Stiebig, Technical Digest of the International PVSEC-14, Bangkok, Thailand, 26-30 Jan. 2004, p. 655.
25. P. Lechner, R. Geyer, H. Schade, B. Rech, and J. Müller, Proc. of 28th IEEE Photovoltaic Specialists Conference, Anchorage, Alaska, 15-22 Sept. 2000 (IEEE Inc., 2000), p. 861.
26. T. Brammer, E. Bunte, H. Stiebig, F. Finger, and H. Wagner, Proc. of the 16th European Photovoltaic Solar Energy Conference, Glasgow, UK, 1-5 May 2000, edited by, H. Scheer, B. McNelis, W. Palz, H. A. Ossenbrink, and, P. Helm, (James & James Ltd., 2000), p. 545.
27. L. Houben, M. Luysberg, P. Hapke, R. Carius, F. Finger, and H. Wagner, Philos. Mag. A 77, 1447 (1998).
28. M. Luysberg, C. Scholten, L. Houben, R. Carius, F. Finger, and O. Vetterl, Mater. Res. Soc. Symp. Proc. 664, A15.2 (2001).
29. S. Vepřek, Mater. Res. Soc. Symp. Proc. 164, 39 (1990).
30. C. C. Tsai, G. B. Anderson, R. Thompson, and B. Wacker, J. Non-Cryst. Solids 114, 151 (1989).
31. K. Nakamura, K. Yoshida, S. Takeoka, and I. Shimizu, Jpn. J. Appl. Phys., Part 1 34, 442 (1995).
32. H. Shirai, J. Hanna, and I. Shimizu, Jpn. J. Appl. Phys., Part 2 30, L679 (1991).
33. J. K. Rath, R. H. J. Franken, A. Gordijn, R. E. I. Schropp, and W. J. Goedheer, J. Non-Cryst. Solids 338-340, 56 (2004).
34. B. Rech, T. Roschek, T. Repmann, J. Müller, R. Schmitz, and W. Appenzeller, Thin Solid Films 427, 157 (2002).
35. M. Kondo, H. Fujiwara, and A. Matsuda, Thin Solid Films 430, 130 (2003).
36. C. Niikura, M. Kondo, and A. Matsuda, J. Non-Cryst. Solids 338-340, 42 (2004).
37. A. L. Baia Neto, A. Lambertz, R. Carius, and F. Finger, J. Non-Cryst. Solids 299-302, 274 (2002).