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Volumn 47, Issue 21, 2012, Pages 7399-7416

Recent progress in ab initio simulations of hafnia-based gate stacks

Author keywords

[No Author keywords available]

Indexed keywords

AB INITIO SIMULATIONS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FIRST-PRINCIPLES STUDY; FUNDAMENTAL RESEARCH; HIGH DIELECTRIC CONSTANTS; POLYSILICON ELECTRODES; RESEARCH COMMUNITIES; TECHNOLOGICAL EVOLUTION;

EID: 84865236716     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-012-6568-y     Document Type: Article
Times cited : (65)

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