-
2
-
-
31044455312
-
High dielectric constant gate oxides for metal oxide Si transistors
-
DOI 10.1088/0034-4885/69/2/R02, PII S0034488506721856
-
J. Robertson, Rep. Prog. Phys. 69, 327 (2006). 10.1088/0034-4885/69/2/R02 (Pubitemid 43121643)
-
(2006)
Reports on Progress in Physics
, vol.69
, Issue.2
, pp. 327-396
-
-
Robertson, J.1
-
3
-
-
0041779849
-
-
10.1146/annurev.matsci.33.011403.113718
-
D. R. Clarke and C. G. Levi, Annu. Rev. Mater. Res. 33, 383 (2003). 10.1146/annurev.matsci.33.011403.113718
-
(2003)
Annu. Rev. Mater. Res.
, vol.33
, pp. 383
-
-
Clarke, D.R.1
Levi, C.G.2
-
5
-
-
0035391117
-
2 in fluorite phase
-
DOI 10.1016/S0026-2714(01)00070-1, PII S0026271401000701
-
J. DA̧browski, V. Zavodinsky, and A. Fleszar, Microelectron. Reliab. 41, 1093 (2001). 10.1016/S0026-2714(01)00070-1 (Pubitemid 32704897)
-
(2001)
Microelectronics and Reliability
, vol.41
, Issue.7
, pp. 1093-1096
-
-
Dabrowski, J.1
Zavodinsky, V.2
Fleszar, A.3
-
6
-
-
18744406968
-
Band offsets and Schottky barrier heights of high dielectric constant oxides
-
DOI 10.1063/1.1506388
-
P. W. Peacock and J. Robertson, J. Appl. Phys. 92, 4712 (2002). 10.1063/1.1506388 (Pubitemid 35328353)
-
(2002)
Journal of Applied Physics
, vol.92
, Issue.8
, pp. 4712
-
-
Peacock, P.W.1
Robertson, J.2
-
7
-
-
14944344118
-
2 zirconia
-
DOI 10.1103/PhysRevB.70.245116, 245116
-
L. K. Dash, N. Vast, P. Baranek, M. C. Cheynet, and L. Reining, Phys. Rev. B 70, 245116 (2004). 10.1103/PhysRevB.70.245116 (Pubitemid 40362433)
-
(2004)
Physical Review B - Condensed Matter and Materials Physics
, vol.70
, Issue.24
, pp. 1-17
-
-
Dash, L.K.1
Vast, N.2
Baranek, P.3
Cheynet, M.-C.4
Reining, L.5
-
8
-
-
28044473015
-
Band gaps and defect levels in functional oxides
-
DOI 10.1016/j.tsf.2005.08.175, PII S0040609005014082, Proceedings of the Fourth International Symposium on Transparent Oxide Thin Film for Electronics and Optics (TOEO-4)
-
J. Robertson, K. Xiong, and S. J. Clark, Thin Solid Films 496, 1 (2006). 10.1016/j.tsf.2005.08.175 (Pubitemid 41689856)
-
(2006)
Thin Solid Films
, vol.496
, Issue.1
, pp. 1-7
-
-
Robertson, J.1
Xiong, K.2
Clark, S.J.3
-
9
-
-
33846096369
-
2: A consistent interpretation of trap assisted conduction, direct electron injection, and optical absorption experiments
-
DOI 10.1063/1.2424441
-
P. Broqvist and A. Pasquarello, Appl. Phys. Lett. 89, 262904 (2006). 10.1063/1.2424441 (Pubitemid 46058048)
-
(2006)
Applied Physics Letters
, vol.89
, Issue.26
, pp. 262904
-
-
Broqvist, P.1
Pasquarello, A.2
-
10
-
-
33747855477
-
2 as charge traps in high-k stacks
-
DOI 10.1063/1.2236466
-
J. L. Gavartin, D. Munoz Ramo, A. L. Shluger, G. Bersuker, and B. H. Lee, Appl. Phys. Lett. 89, 082908 (2006). 10.1063/1.2236466 (Pubitemid 44286166)
-
(2006)
Applied Physics Letters
, vol.89
, Issue.8
, pp. 082908
-
-
Gavartin, J.L.1
Ramo, D.M.2
Shluger, A.L.3
Bersuker, G.4
Lee, B.H.5
-
11
-
-
0004009372
-
-
Wiley, New York
-
F. A. Cotton, G. Wilkinson, C. A. Murillo, and M. Bochmann, Advanced Inorganic Chemistry (Wiley, New York, 2000).
-
(2000)
Advanced Inorganic Chemistry
-
-
Cotton, F.A.1
Wilkinson, G.2
Murillo, C.A.3
Bochmann, M.4
-
12
-
-
67650716579
-
-
Oxford University Press, Oxford, 10.1093/acprof:oso/9780199216949.001. 0001
-
W.-K. Li, G.-D. Zhou, and T. C. W. Mak, Advanced Structural Inorganic Chemistry (Oxford University Press, Oxford, 2008). 10.1093/acprof:oso/ 9780199216949.001.0001
-
(2008)
Advanced Structural Inorganic Chemistry
-
-
Li, W.-K.1
Zhou, G.-D.2
Mak, T.C.W.3
-
13
-
-
79955986464
-
2
-
DOI 10.1063/1.1458692
-
M. Gutowski, J. E. Jaffe, C.-L. Liu, M. Stoker, R. I. Hedge, R. S. Rai, and P. J. Tobin, Appl. Phys. Lett. 80, 1897 (2002). 10.1063/1.1458692 (Pubitemid 34326232)
-
(2002)
Applied Physics Letters
, vol.80
, Issue.11
, pp. 1897
-
-
Gutowski, M.1
Jaffe, J.E.2
Liu, C.-L.3
Stoker, M.4
Hegde, R.I.5
Rai, R.S.6
Tobin, P.J.7
-
14
-
-
14544268556
-
Dielectric properties of crystalline and amorphous transition metal oxides and silicates as potential high-κ candidates: The contribution of density-functional theory
-
DOI 10.1088/0953-8984/17/7/R03
-
G.-M. Rignanese, J. Phys.: Condens. Matter 17, R357 (2005). 10.1088/0953-8984/17/7/R03 (Pubitemid 40305202)
-
(2005)
Journal of Physics Condensed Matter
, vol.17
, Issue.7
-
-
Rignanese, G.-M.1
-
15
-
-
0037394021
-
-
10.1046/j.1365-2818.2003.01175.x
-
S. Stemmer, Z. Q. Chen, W. J. Chu, and T. P. Ma, J. Microsc. 210, 74 (2003). 10.1046/j.1365-2818.2003.01175.x
-
(2003)
J. Microsc.
, vol.210
, pp. 74
-
-
Stemmer, S.1
Chen, Z.Q.2
Chu, W.J.3
Ma, T.P.4
-
16
-
-
79956027162
-
2 thin films and the high-temperature annealing effects on their optical properties
-
DOI 10.1063/1.1448384
-
Y. J. Cho, N. V. Nguyen, C. A. Richter, J. R. Ehrstein, B. H. Lee, and J. C. Lee, Appl. Phys. Lett. 80, 1249 (2002). 10.1063/1.1448384 (Pubitemid 34180541)
-
(2002)
Applied Physics Letters
, vol.80
, Issue.7
, pp. 1249
-
-
Cho, Y.J.1
Nguyen, N.V.2
Richter, C.A.3
Ehrstein, J.R.4
Lee, B.H.5
Lee, J.C.6
-
17
-
-
4544294836
-
-
10.1016/j.tsf.2004.01.110
-
J. Aarik, H. Mändar, M. Kirm, and L. Pung, Thin Solid Films 466, 41 (2004). 10.1016/j.tsf.2004.01.110
-
(2004)
Thin Solid Films
, vol.466
, pp. 41
-
-
Aarik, J.1
Mändar, H.2
Kirm, M.3
Pung, L.4
-
18
-
-
20444478641
-
Similarities in photoluminescence in hafnia and zirconia induced by ultraviolet photons
-
DOI 10.1063/1.1856220, 054104
-
T. Ito, M. Maeda, K. Nakamura, H. Kato, and Y. Ohki, J. Appl. Phys. 97, 054104 (2005). 10.1063/1.1856220 (Pubitemid 40818251)
-
(2005)
Journal of Applied Physics
, vol.97
, Issue.5
, pp. 1-7
-
-
Ito, T.1
Maeda, M.2
Nakamura, K.3
Kato, H.4
Ohki, Y.5
-
19
-
-
0000214962
-
-
10.1016/0040-6090(77)90312-1
-
M. Balog, M. Schieber, M. Michiman, and S. Patai, Thin Solid Films 41, 247 (1977). 10.1016/0040-6090(77)90312-1
-
(1977)
Thin Solid Films
, vol.41
, pp. 247
-
-
Balog, M.1
Schieber, M.2
Michiman, M.3
Patai, S.4
-
20
-
-
0036537434
-
Dielectric functions and optical bandgaps of high-K dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry
-
DOI 10.1063/1.1456246
-
S.-G. Lim, S. Kriventsov, T. N. Jackson, J. H. Haeni, D. G. Schlom, A. M. Balbashov, R. Uecker, P. Reiche, J. L. Freeouf, and G. Lucovsky, J. Appl. Phys. 91, 4500 (2002). 10.1063/1.1456246 (Pubitemid 34435605)
-
(2002)
Journal of Applied Physics
, vol.91
, Issue.7
, pp. 4500
-
-
Lim, S.-G.1
Kriventsov, S.2
Jackson, T.N.3
Haeni, J.H.4
Schlom, D.G.5
Balbashov, A.M.6
Uecker, R.7
Reiche, P.8
Freeouf, J.L.9
Lucovsky, G.10
-
21
-
-
0035894001
-
Physical and electrical characterization of Hafnium oxide and Hafnium silicate sputtered films
-
DOI 10.1063/1.1417991
-
A. Callegari, E. Cartier, M. Gribelyuk, H. Okorn-Schmidt, and T. Zable, J. Appl. Phys. 90, 6466 (2001). 10.1063/1.1417991 (Pubitemid 34046824)
-
(2001)
Journal of Applied Physics
, vol.90
, Issue.12
, pp. 6466
-
-
Callegari, A.1
Cartier, E.2
Gribelyuk, M.3
Okorn-Schmidt, H.F.4
Zabel, T.5
-
22
-
-
0036863349
-
-
10.1109/LED.2002.805000
-
W. J. Zhu, T. Tamagawa, M. Gibson, T. Furukawa, and T. P. Ma, IEEE Electron Device Lett. 23, 649 (2002). 10.1109/LED.2002.805000
-
(2002)
IEEE Electron Device Lett.
, vol.23
, pp. 649
-
-
Zhu, W.J.1
Tamagawa, T.2
Gibson, M.3
Furukawa, T.4
Ma, T.P.5
-
23
-
-
0042231963
-
-
10.1117/12.463984
-
M. Modreanu, P. K. Hurley, B. J. O'Sullivan, B. O'Looney, J.-P. Senateur, H. Rousell, F. Rousell, M. Audier, C. Dubourdieu, I. W. Boyd Q. Fang, T. L. Leedham, S. A. Rushworth, A. C. Jones, H. O. Davies, and C. Jimenez, Proc. SPIE 4876, 1236 (2003). 10.1117/12.463984
-
(2003)
Proc. SPIE
, vol.4876
, pp. 1236
-
-
Modreanu, M.1
Hurley, P.K.2
O'Sullivan, B.J.3
O'Looney, B.4
Senateur, J.-P.5
Rousell, H.6
Rousell, F.7
Audier, M.8
Dubourdieu, C.9
Boyd, I.W.10
Fang, Q.11
Leedham, T.L.12
Rushworth, S.A.13
Jones, A.C.14
Davies, H.O.15
Jimenez, C.16
-
24
-
-
17444364755
-
-
International Conference on Characterization and Meterology for ULSI Technology, edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla, and E. M. Secula (AIP Press, Melville, NY
-
N. V. Nguyen, J.-P. Han, J. Y. Kim, E. Wilcox, Y. J. Cho, W. Zhu, Z. Luo, and T. P. Ma, International Conference on Characterization and Meterology for ULSI Technology, edited by, D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, S. Zollner, R. P. Khosla, and, E. M. Secula, (AIP Press, Melville, NY, 2003), pp. 181-185.
-
(2003)
, pp. 181-185
-
-
Nguyen, N.V.1
Han, J.-P.2
Kim, J.Y.3
Wilcox, E.4
Cho, Y.J.5
Zhu, W.6
Luo, Z.7
Ma, T.P.8
-
26
-
-
19944362147
-
2/p-Si gate stacks
-
DOI 10.1063/1.1803107, 7
-
S. Sayan, T. Emge, E. Garfunkel, X. Zhao, L. Wielunski, R. A. Bartynski, D. Vanderbilt, J. S. Suehle, S. Suzer, and M. Banaszak-Holl, J. Appl. Phys. 96, 7485 (2004). 10.1063/1.1803107 (Pubitemid 40044441)
-
(2004)
Journal of Applied Physics
, vol.96
, Issue.12
, pp. 7485-7491
-
-
Sayan, S.1
Emge, T.2
Garfunkel, E.3
Zhao, X.4
Wielunski, L.5
Bartynski, R.A.6
Vanderbilt, D.7
Suehle, J.S.8
Suzer, S.9
Banaszak-Holl, M.10
-
27
-
-
79955987885
-
1-x on (100) Si
-
DOI 10.1063/1.1492024
-
H. Y. Yu, M. F. Li, B. J. Cho, C. C. Yeo, M. S. Joo, D.-L. Kwong, J. S. Pan, C. H. Ang, J. Z. Zheng, and S. Ramanathan, Appl. Phys. Lett. 81, 376 (2002). 10.1063/1.1492024 (Pubitemid 34803052)
-
(2002)
Applied Physics Letters
, vol.81
, Issue.2
, pp. 376
-
-
Yu, H.Y.1
Li, M.F.2
Cho, B.J.3
Yeo, C.C.4
Joo, M.S.5
Kwong, D.-L.6
Pan, J.S.7
Ang, C.H.8
Zheng, J.Z.9
Ramanathan, S.10
-
29
-
-
79956051787
-
2
-
DOI 10.1063/1.1495088
-
V. V. Afanas'ev, A. Stesmans, F. Chen, X. Shi, and S. A. Campbell, Appl. Phys. Lett. 81, 1053 (2002). 10.1063/1.1495088 (Pubitemid 34945766)
-
(2002)
Applied Physics Letters
, vol.81
, Issue.6
, pp. 1053
-
-
Afanas'ev, V.V.1
Stesmans, A.2
Chen, F.3
Shi, X.4
Campbell, S.A.5
-
30
-
-
27344443406
-
2 high-dielectric-constant gate oxide
-
DOI 10.1063/1.2119425, 183505
-
K. Xiong, J. Robertson, M. C. Gibson, and S. J. Clark, Appl. Phys. Lett. 87, 183505 (2005). 10.1063/1.2119425 (Pubitemid 41528237)
-
(2005)
Applied Physics Letters
, vol.87
, Issue.18
, pp. 1-3
-
-
Xiong, K.1
Robertson, J.2
Gibson, M.C.3
Clark, S.J.4
-
31
-
-
10844282779
-
High dielectric constant oxides
-
DOI 10.1051/epjap:2004206
-
J. Robertson, Eur. Phys. J.: Appl. Phys. 28, 265 (2004). 10.1051/epjap:2004206 (Pubitemid 40002196)
-
(2004)
EPJ Applied Physics
, vol.28
, Issue.3
, pp. 265-291
-
-
Robertson, J.1
-
35
-
-
55649111186
-
-
10.1002/pssb.200743380
-
P. Rinke, A. Qteish, J. Neugebauer, and M. Scheffler, Phys. Status Solidi B 245, 929 (2008). 10.1002/pssb.200743380
-
(2008)
Phys. Status Solidi B
, vol.245
, pp. 929
-
-
Rinke, P.1
Qteish, A.2
Neugebauer, J.3
Scheffler, M.4
-
36
-
-
1642536397
-
-
10.1143/JJAP.42.6946
-
S. Kobayashi, A. Yamasaki, and T. Fujiwara, Jpn. J. Appl. Phys., Part 1 42, 6946 (2003). 10.1143/JJAP.42.6946
-
(2003)
Jpn. J. Appl. Phys., Part 1
, vol.42
, pp. 6946
-
-
Kobayashi, S.1
Yamasaki, A.2
Fujiwara, T.3
-
37
-
-
65649090279
-
-
10.1103/PhysRevB.79.195101
-
R. Shaltaf, T. Rangel, M. Grüning, X. Gonze, G.-M. Rignanese, and D. R. Hamann, Phys. Rev. B 79, 195101 (2009). 10.1103/PhysRevB.79.195101
-
(2009)
Phys. Rev. B
, vol.79
, pp. 195101
-
-
Shaltaf, R.1
Rangel, T.2
Grüning, M.3
Gonze, X.4
Rignanese, G.-M.5
Hamann, D.R.6
-
42
-
-
0000697187
-
-
10.1103/PhysRevB.55.13494
-
S. Massidda, A. Continenza, M. Posternak, and A. Baldereschi, Phys. Rev. B 55, 13494 (1997). 10.1103/PhysRevB.55.13494
-
(1997)
Phys. Rev. B
, vol.55
, pp. 13494
-
-
Massidda, S.1
Continenza, A.2
Posternak, M.3
Baldereschi, A.4
-
44
-
-
37749024044
-
-
10.1103/PhysRevLett.99.266402
-
M. Gatti, F. Bruneval, V. Olevano, and L. Reining, Phys. Rev. Lett. 99, 266402 (2007). 10.1103/PhysRevLett.99.266402
-
(2007)
Phys. Rev. Lett.
, vol.99
, pp. 266402
-
-
Gatti, M.1
Bruneval, F.2
Olevano, V.3
Reining, L.4
-
46
-
-
63649103030
-
-
10.1103/PhysRevLett.102.126403
-
H. Jiang, R. I. Gomez-Abal, P. Rinke, and M. Scheffler, Phys. Rev. Lett. 102, 126403 (2009). 10.1103/PhysRevLett.102.126403
-
(2009)
Phys. Rev. Lett.
, vol.102
, pp. 126403
-
-
Jiang, H.1
Gomez-Abal, R.I.2
Rinke, P.3
Scheffler, M.4
-
47
-
-
36149016819
-
-
10.1103/PhysRev.139.A796
-
L. Hedin, Phys. Rev. 139, A796 (1965). 10.1103/PhysRev.139.A796
-
(1965)
Phys. Rev.
, vol.139
, pp. 796
-
-
Hedin, L.1
-
50
-
-
21344438863
-
Combining GW calculations with exact-exchange density-functional theory: An analysis of valence-band photoemission for compound semiconductors
-
DOI 10.1088/1367-2630/7/1/126, PII S1367263005911257
-
P. Rinke, A. Qteish, J. Neugebauer, C. Freysoldt, and M. Scheffler, New J. Phys. 7, 126 (2005). 10.1088/1367-2630/7/1/126 (Pubitemid 40906137)
-
(2005)
New Journal of Physics
, vol.7
-
-
Rinke, P.1
Qteish, A.2
Neugebauer, J.3
Freysoldt, C.4
Scheffler, M.5
-
51
-
-
34347372420
-
-
10.1103/PhysRevB.75.235102
-
M. Shishkin and G. Kresse, Phys. Rev. B 75, 235102 (2007). 10.1103/PhysRevB.75.235102
-
(2007)
Phys. Rev. B
, vol.75
, pp. 235102
-
-
Shishkin, M.1
Kresse, G.2
-
52
-
-
0003417617
-
-
edited by K. Schwarz (Technische Universität Wien, Austria
-
P. Blaha, K. Schwarz, G. K. H. Madsen, D. Kvasnicka, and J. Luitz, WIEN2k, An Augmented Plane Wave Plus Local Orbitals Program for Calculating Crystal Properties, edited by, K. Schwarz, (Technische Universität Wien, Austria, 2001).
-
(2001)
WIEN2k, An Augmented Plane Wave Plus Local Orbitals Program for Calculating Crystal Properties
-
-
Blaha, P.1
Schwarz, K.2
Madsen, G.K.H.3
Kvasnicka, D.4
Luitz, J.5
-
53
-
-
0036681591
-
Electronic structure calculations of solids using the WIEN2k package for material sciences
-
DOI 10.1016/S0010-4655(02)00206-0, PII S0010465502002060
-
K. Schwarz, P. Blaha, and G. K. H. Madsen, Comput. Phys. Commun. 147, 71 (2002). 10.1016/S0010-4655(02)00206-0 (Pubitemid 34822669)
-
(2002)
Computer Physics Communications
, vol.147
, Issue.1-2
, pp. 71-76
-
-
Schwarz, K.1
Blaha, P.2
Madsen, G.K.H.3
-
54
-
-
51649083544
-
-
10.1103/PhysRevLett.101.106404
-
R. Gomez-Abal, X. Li, M. Scheffler, and C. Ambrosch-Draxl, Phys. Rev. Lett. 101, 106404 (2008). 10.1103/PhysRevLett.101.106404
-
(2008)
Phys. Rev. Lett.
, vol.101
, pp. 106404
-
-
Gomez-Abal, R.1
Li, X.2
Scheffler, M.3
Ambrosch-Draxl, C.4
-
56
-
-
77954891404
-
-
In WIEN2K DFT calculations the following parameters for the FP- (L) APW+lo basis were used: muffin-tin (MT) radii RMT =2.0 bohr for zirconium and hafnium, 1.8 bohr for oxygen; wave functions in the MT spheres were expanded in spherical harmonics with l up to lmax =10; the potential by cubic harmonics l up to lmax =4; the energy cutoff for interstitial plane waves was 205 eV ( RMT × Kmax =7.0 ). In the GW calculations, all important convergence parameters have been monitored to achieve an overall numerical accuracy of 0.05 eV. The Brillioun zone was sampled with 4×4×4, 4×4×3, and 2×2×2 k meshes for the cubic, tetragonal, and monoclinic phase, respectively, and unoccupied states with energy up to 136 eV were taken into account.
-
In WIEN2K DFT calculations the following parameters for the FP- (L) APW + lo basis were used: muffin-tin (MT) radii R MT = 2.0 bohr for zirconium and hafnium, 1.8 bohr for oxygen; wave functions in the MT spheres were expanded in spherical harmonics with l up to l max = 10; the potential by cubic harmonics l up to l max = 4; the energy cutoff for interstitial plane waves was 205 eV (R MT × K max = 7.0). In the G W calculations, all important convergence parameters have been monitored to achieve an overall numerical accuracy of 0.05 eV. The Brillioun zone was sampled with 4 × 4 × 4, 4 × 4 × 3, and 2 × 2 × 2 k meshes for the cubic, tetragonal, and monoclinic phase, respectively, and unoccupied states with energy up to 136 eV were taken into account.
-
-
-
-
58
-
-
37649026786
-
-
10.1103/PhysRevB.69.184301
-
G. M. Rignanese, X. Gonze, G. Jun, K. Cho, and A. Pasquarello, Phys. Rev. B 69, 184301 (2004). 10.1103/PhysRevB.69.184301
-
(2004)
Phys. Rev. B
, vol.69
, pp. 184301
-
-
Rignanese, G.M.1
Gonze, X.2
Jun, G.3
Cho, K.4
Pasquarello, A.5
-
59
-
-
8844255437
-
-
10.1103/PhysRevB.70.099903
-
G. M. Rignanese, X. Gonze, G. Jun, K. Cho, and A. Pasquarello, Phys. Rev. B 70, 099903 (E) (2004). 10.1103/PhysRevB.70.099903
-
(2004)
Phys. Rev. B
, vol.70
, pp. 099903
-
-
Rignanese, G.M.1
Gonze, X.2
Jun, G.3
Cho, K.4
Pasquarello, A.5
-
60
-
-
2142640925
-
-
10.1103/PhysRevB.69.115110
-
R. van Leeuwen, Phys. Rev. B 69, 115110 (2004). 10.1103/PhysRevB.69. 115110
-
(2004)
Phys. Rev. B
, vol.69
, pp. 115110
-
-
Van Leeuwen, R.1
-
61
-
-
51649120123
-
-
10.1103/PhysRevLett.101.106405
-
A. Marini, Phys. Rev. Lett. 101, 106405 (2008). 10.1103/PhysRevLett.101. 106405
-
(2008)
Phys. Rev. Lett.
, vol.101
, pp. 106405
-
-
Marini, A.1
-
63
-
-
33751249913
-
Superconductivity in diamond, electron-phonon interaction and the zero-point renormalization of semiconducting gaps
-
DOI 10.1016/j.stam.2006.03.009, PII S1468699606001100
-
M. Cardona, Sci. Technol. Adv. Mater. 7, S60 (2006). 10.1016/j.stam.2006. 03.009 (Pubitemid 44792545)
-
(2006)
Science and Technology of Advanced Materials
, vol.7
, Issue.SUPPL. 1
, pp. 60-66
-
-
Cardona, M.1
-
64
-
-
77954940994
-
-
unpublished
-
P. Rinke, A. Greuling, A. Janotti, H. Jiang, E. Kioupakis, M. Rohlfing, M. Scheffler, and C. G. Van de Walle (unpublished).
-
-
-
Rinke, P.1
Greuling, A.2
Janotti, A.3
Jiang, H.4
Kioupakis, E.5
Rohlfing, M.6
Scheffler, M.7
Van De Walle, C.G.8
-
66
-
-
54049141296
-
-
10.1063/1.2985908
-
G. H. Chen, Z. F. Hou, X. G. Gong, and Q. Li, J. Appl. Phys. 104, 074101 (2008). 10.1063/1.2985908
-
(2008)
J. Appl. Phys.
, vol.104
, pp. 074101
-
-
Chen, G.H.1
Hou, Z.F.2
Gong, X.G.3
Li, Q.4
-
67
-
-
4644254967
-
Crystallization in hafnia- and zirconia-based systems
-
DOI 10.1002/pssb.200404935
-
S. V. Ushakov, A. Navrotsky, Y. Yang, S. Stemmer, K. Kukli, M. Ritala, M. A. Leskelä, P. Fejes, A. Demkov, C. Wang, B.-Y. Nguyen, D. Triyoso, and P. Tobin, Phys. Status Solidi B 241, 2268 (2004). 10.1002/pssb.200404935 (Pubitemid 39288395)
-
(2004)
Physica Status Solidi (B) Basic Research
, vol.241
, Issue.10
, pp. 2268-2278
-
-
Ushakov, S.V.1
Navrotsky, A.2
Yang, Y.3
Stemmer, S.4
Kukli, K.5
Ritala, M.6
Leskela, M.A.7
Fejes, P.8
Demkov, A.9
Wang, C.10
Nguyen, B.-Y.11
Triyoso, D.12
Tobin, P.13
-
68
-
-
29644440135
-
Low-temperature polymorphs of ZrO2 and HfO2: A density-functional theory study
-
DOI 10.1103/PhysRevB.72.144107, 144107
-
J. E. Jaffe, R. A. Bachorz, and M. Gutowski, Phys. Rev. B 72, 144107 (2005). 10.1103/PhysRevB.72.144107 (Pubitemid 43022339)
-
(2005)
Physical Review B - Condensed Matter and Materials Physics
, vol.72
, Issue.14
, pp. 1-9
-
-
Jaffe, J.E.1
Bachorz, R.A.2
Gutowski, M.3
-
69
-
-
30544444207
-
2
-
DOI 10.1021/jp053593e
-
W. Zheng, J. K. H. Bowen, J. Li, I. Dabkowska, and M. Gutowski, J. Phys. Chem. A 109, 11521 (2005). 10.1021/jp053593e (Pubitemid 43081382)
-
(2005)
Journal of Physical Chemistry A
, vol.109
, Issue.50
, pp. 11521-11525
-
-
Zheng, W.1
Bowen Jr., K.H.2
Li, J.3
Dabkowska, I.4
Gutowski, M.5
-
70
-
-
33947305102
-
Atomic and electronic structure of amorphous and crystalline hafnium oxide: X-ray photoelectron spectroscopy and density functional calculations
-
DOI 10.1063/1.2464184
-
T. V. Perevalov, V. A. Gritsenko, S. B. Erenburg, A. M. Badalyan, H. Wong, and C. W. Kim, J. Appl. Phys. 101, 053704 (2007). 10.1063/1.2464184 (Pubitemid 46439966)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.5
, pp. 053704
-
-
Perevalov, T.V.1
Gritsenko, V.A.2
Erenburg, S.B.3
Badalyan, A.M.4
Wong, H.5
Kim, C.W.6
-
72
-
-
4644357044
-
y/n-Si CMOS gate stack: A combined photoemission and inverse photoemission study
-
DOI 10.1002/pssb.200404945
-
S. Sayan, R. A. Bartynski, X. Zhao, E. P. Gusev, D. Vanderbilt, M. Croft, M. Banaszak-Holl, and E. Garfunkel, Phys. Status Solidi B 241, 2246 (2004). 10.1002/pssb.200404945 (Pubitemid 39288393)
-
(2004)
Physica Status Solidi (B) Basic Research
, vol.241
, Issue.10
, pp. 2246-2252
-
-
Sayan, S.1
Bartynski, R.A.2
Zhao, X.3
Gusev, E.P.4
Vanderbilt, D.5
Croft, M.6
Holl, M.B.7
Garfunkel, E.8
-
73
-
-
49649120615
-
-
10.1103/PhysRevB.78.085114
-
E. Bersch, S. Rangan, R. A. Bartynski, E. Garfunkel, and E. Vescovo, Phys. Rev. B 78, 085114 (2008). 10.1103/PhysRevB.78.085114
-
(2008)
Phys. Rev. B
, vol.78
, pp. 085114
-
-
Bersch, E.1
Rangan, S.2
Bartynski, R.A.3
Garfunkel, E.4
Vescovo, E.5
-
76
-
-
0036567767
-
2 layer using X-ray photoelectron spectroscopy
-
DOI 10.1016/S0022-3093(02)00970-5, PII S0022309302009705
-
H. Nohira, W. Tsai, W. Besling, E. Young, J. Petry, T. Conard, W. Vandervorst, S. De Gendt, M. Heyns, J. Maes, and M. Tuominen, J. Non-Cryst. Solids 303, 83 (2002). 10.1016/S0022-3093(02)00970-5 (Pubitemid 34410830)
-
(2002)
Journal of Non-Crystalline Solids
, vol.303
, Issue.1
, pp. 83-87
-
-
Nohira, H.1
Tsai, W.2
Besling, W.3
Young, E.4
Petry, J.5
Conard, T.6
Vandervorst, W.7
De Gendt, S.8
Heyns, M.9
Maes, J.10
Tuominen, M.11
-
78
-
-
33947322358
-
Crystal structure and band gap determination of Hf O2 thin films
-
DOI 10.1063/1.2697551
-
M. C. Cheynet, S. Pokrant, F. D. Tichelaar, and J.-L. Rouviere, J. Appl. Phys. 101, 054101 (2007). 10.1063/1.2697551 (Pubitemid 46439994)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.5
, pp. 054101
-
-
Cheynet, M.C.1
Pokrant, S.2
Tichelaar, F.D.3
Rouvire, J.-L.4
-
79
-
-
2942570078
-
-
10.1016/j.elspec.2004.02.083
-
S. Toyoda, J. Okabayashi, H. Kumigashira, M. Oshima, K. Ono, M. Niwa, K. Usuda, and N. Hirashita, J. Electron Spectrosc. Relat. Phenom. 137-140, 141 (2004). 10.1016/j.elspec.2004.02.083
-
(2004)
J. Electron Spectrosc. Relat. Phenom.
, vol.137-140
, pp. 141
-
-
Toyoda, S.1
Okabayashi, J.2
Kumigashira, H.3
Oshima, M.4
Ono, K.5
Niwa, M.6
Usuda, K.7
Hirashita, N.8
-
80
-
-
33846107462
-
2 thin films by nitrogen-assisted reactive magnetron sputtering
-
DOI 10.1016/j.mssp.2006.10.019, PII S1369800106002459, E-MRS 2006 Spring Meeting - Symposium L: Characterization of high-k dielectric materials
-
L. Zhu, Q. Fang, G. He, M. Liu, X. Xu, and L. Zhang, Mater. Sci. Semicond. Process. 9, 1025 (2006). 10.1016/j.mssp.2006.10.019 (Pubitemid 46073858)
-
(2006)
Materials Science in Semiconductor Processing
, vol.9
, Issue.6
, pp. 1025-1030
-
-
Zhu, L.Q.1
Fang, Q.2
He, G.3
Liu, M.4
Xu, X.X.5
Zhang, L.D.6
-
81
-
-
31044438318
-
Optical band gaps and composition dependence of hafnium-aluminate thin films grown by atomic layer chemical vapor deposition
-
DOI 10.1116/1.2091096
-
N. V. Nguyen, S. Sayan, I. Levin, J. R. Ehrstein, I. J. R. Baumvol, C. Driemeier, C. Krug, L. Wielunski, P. Y. Hung, and A. Diebold, J. Vac. Sci. Technol. A 23, 1706 (2005). 10.1116/1.2091096 (Pubitemid 43119407)
-
(2005)
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
, vol.23
, Issue.6
, pp. 1706-1713
-
-
Nguyen, N.V.1
Sayan, S.2
Levin, I.3
Ehrstein, J.R.4
Baumvol, I.J.R.5
Driemeier, C.6
Krug, C.7
Wielunski, L.8
Hung, P.Y.9
Diebold, A.10
-
82
-
-
0037120381
-
-
10.1103/PhysRevLett.89.126401
-
W. Ku and A. G. Eguiluz, Phys. Rev. Lett. 89, 126401 (2002). 10.1103/PhysRevLett.89.126401
-
(2002)
Phys. Rev. Lett.
, vol.89
, pp. 126401
-
-
Ku, W.1
Eguiluz, A.G.2
-
84
-
-
1642603066
-
-
10.1016/j.mee.2004.01.006
-
G. Lucovsky, Y. Zhang, J. L. Whitten, D. G. Schlom, and J. L. Freeouf, Microelectron. Eng. 72, 288 (2004). 10.1016/j.mee.2004.01.006
-
(2004)
Microelectron. Eng.
, vol.72
, pp. 288
-
-
Lucovsky, G.1
Zhang, Y.2
Whitten, J.L.3
Schlom, D.G.4
Freeouf, J.L.5
-
85
-
-
27144531276
-
Many-body perturbation theory using the density-functional concept: Beyond the GW approximation
-
DOI 10.1103/PhysRevLett.94.186402, 186402
-
F. Bruneval, F. Sottile, V. Olevano, R. Del Sole, and L. Reining, Phys. Rev. Lett. 94, 186402 (2005). 10.1103/PhysRevLett.94.186402 (Pubitemid 41493064)
-
(2005)
Physical Review Letters
, vol.94
, Issue.18
, pp. 1-4
-
-
Bruneval, F.1
Sottile, F.2
Olevano, V.3
Del Sole, R.4
Reining, L.5
-
86
-
-
37249050372
-
Accurate quasiparticle spectra from self-consistent GW calculations with vertex corrections
-
DOI 10.1103/PhysRevLett.99.246403
-
M. Shishkin, M. Marsman, and G. Kresse, Phys. Rev. Lett. 99, 246403 (2007). 10.1103/PhysRevLett.99.246403 (Pubitemid 350276636)
-
(2007)
Physical Review Letters
, vol.99
, Issue.24
, pp. 246403
-
-
Shishkin, M.1
Marsman, M.2
Kresse, G.3
-
87
-
-
35148854541
-
-
10.1103/PhysRevB.76.155106
-
A. J. Morris, M. Stankovski, K. T. Delaney, P. Rinke, P. García-González, and R. W. Godby, Phys. Rev. B 76, 155106 (2007). 10.1103/PhysRevB.76.155106
-
(2007)
Phys. Rev. B
, vol.76
, pp. 155106
-
-
Morris, A.J.1
Stankovski, M.2
Delaney, K.T.3
Rinke, P.4
García- González, P.5
Godby, R.W.6
-
88
-
-
77954943758
-
-
M. D. Ullrich, J. G. Hong, J. E. Rowe, G. Lucovsky, A. S.-Y. Chan, and M. T. E., J. Vac. Sci. Technol. B 21, 1071 (2003).
-
(2003)
J. Vac. Sci. Technol. B
, vol.21
, pp. 1071
-
-
Ullrich, M.D.1
Hong, J.G.2
Rowe, J.E.3
Lucovsky, G.4
Chan, A.S.-Y.5
M, T.E.6
-
89
-
-
0000469409
-
-
10.1103/PhysRevB.60.5404
-
S.-H. Wei and A. Zunger, Phys. Rev. B 60, 5404 (1999). 10.1103/PhysRevB.60.5404
-
(1999)
Phys. Rev. B
, vol.60
, pp. 5404
-
-
Wei, S.-H.1
Zunger, A.2
-
90
-
-
40949113104
-
-
10.1103/PhysRevB.77.075202
-
P. Rinke, M. Winkelnkemper, A. Qteish, D. Bimberg, J. Neugebauer, and M. Scheffler, Phys. Rev. B 77, 075202 (2008). 10.1103/PhysRevB.77.075202
-
(2008)
Phys. Rev. B
, vol.77
, pp. 075202
-
-
Rinke, P.1
Winkelnkemper, M.2
Qteish, A.3
Bimberg, D.4
Neugebauer, J.5
Scheffler, M.6
|