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Volumn 69, Issue 18, 2004, Pages

First-principles investigation of high-κ dielectrics: Comparison between the silicates and oxides of hafnium and zirconium

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM; OXIDE; OXYGEN DERIVATIVE; SILICATE; SILICON DERIVATIVE; ZIRCONIUM; ZIRCONIUM DERIVATIVE;

EID: 37649026786     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.184301     Document Type: Article
Times cited : (141)

References (44)
  • 2
    • 0000551766 scopus 로고    scopus 로고
    • G.D. Wilk and R.M. Wallace, Appl. Phys. Lett. 74, 2854 (1999); G.D. Wilk and R.M. Wallace, ibid. 76, 112 (2000); G.D. Wilk, R.M. Wallace, and J.M. Anthony, J. Appl. Phys. 87, 484 (2000).
    • (1999) Appl. Phys. Lett. , vol.74 , pp. 2854
    • Wilk, G.D.1    Wallace, R.M.2
  • 3
    • 0001624638 scopus 로고    scopus 로고
    • G.D. Wilk and R.M. Wallace, Appl. Phys. Lett. 74, 2854 (1999); G.D. Wilk and R.M. Wallace, ibid. 76, 112 (2000); G.D. Wilk, R.M. Wallace, and J.M. Anthony, J. Appl. Phys. 87, 484 (2000).
    • (2000) Phys. Lett. , vol.76 , pp. 112
    • Wilk, G.D.1    Wallace, R.M.2
  • 4
    • 0346534582 scopus 로고    scopus 로고
    • G.D. Wilk and R.M. Wallace, Appl. Phys. Lett. 74, 2854 (1999); G.D. Wilk and R.M. Wallace, ibid. 76, 112 (2000); G.D. Wilk, R.M. Wallace, and J.M. Anthony, J. Appl. Phys. 87, 484 (2000).
    • (2000) J. Appl. Phys. , vol.87 , pp. 484
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 13
    • 33646637792 scopus 로고    scopus 로고
    • note
    • 4+) 0.78 for Hf and 0.79 Å for Zr, respectively (Ref. 41). Their electronegativity values are almost equal 1.23 for hafnium and 1.22 for zirconium (Ref. 42).
  • 35
    • 33646652983 scopus 로고    scopus 로고
    • note
    • See for instance Eq. (50) of Ref. 23. Note however that each of the mode contributions can differ individually. It is only their sum that is identical.
  • 41
    • 33646647119 scopus 로고    scopus 로고
    • note
    • m,α* of Refs. 5 and 6.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.