Control of silicidation in HfO2/Si(100) interfaces

Applied Physics Letters

Volumn 86, Issue 4, 2005, Pages

  Cho, Deok Yong ^a   Park, Kee Shik ^a   Choi, B H ^a,d   Oh, S J ^a   Chang, Y J ^a   Kim, D H ^a   Noh, T W ^a   Jung, Ranju ^b   Lee, Jae Cheol ^b   Bu, S D ^c  

^a Seoul National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Chonbuk National University   (South Korea)

^d Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); LASERS; PERMITTIVITY; PULSED LASER DEPOSITION; SILICON; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

HAFNIUM SILICIDE; SILICIDATION; SILICON SUBOXIDES;

HAFNIUM COMPOUNDS;

EID: 13644273772     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1856140     Document Type: Article

References (13)

1. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
2. H. Ikeda, S. Goto, K. Honda, M. Sakashit, A. Sakai, S. Zaima, and Y. Yasuda, Jpn. J. Appl. Phys., Part 1 41, 2476 (2002).
3. P. W. Atkins, Physical Chemistry, 7th ed. (New York, 2002).
4. M.-H. Cho, Y. S. Roh, C. N. Whang, K. Jeong, S. W. Nahm, D.-H. Ko, J. H. Lee, N. I. Lee, and K. Fujihara, Appl. Phys. Lett. 81, 472 (2002).
5. Y.-S. Lin, R. Puthenkovilakam, and J. P. Chang, Appl. Phys. Lett. 81, 2041 (2002).
6. N. Miyata, T. Nabatame, T. Horikawa, M. Ichikawa, and A. Toriumi, Appl. Phys. Lett. 82, 3880 (2003).
7. K. Yamamoto, S. Hayashi, M. Niwa, M. Asai, S. Horii, and H. Miya, Appl. Phys. Lett. 83, 2229 (2003).
8. S. J. Wang, P. C. Lim, A. C. H. Huan, C. L. Liu, J. W. Chai, S. Y. Chow, J. S. Pan, Q. Li, and C. K. Ong, Appl. Phys. Lett. 82, 2047 (2003).
9. G. D. Wilk and D. A. Muller, Appl. Phys. Lett. 83, 3984 (2003).
10. P. D. Kirsch, C. S. Kang, J. Lozano, J. C. Lee, and J. G. Ekerdt, J. Appl. Phys. 91, 4353 (2002).
11. R. Flitsch and S. I. Raider, J. Vac. Sci. Technol. A 12, 305 (1975).
12. O. Renault, D. Samour, J.-F. Damlencourt, D. Blin, F. Martin, S. Marthon, N. T. Barrett, and P. Besson, Appl. Phys. Lett. 81, 3627 (2002).
13. F. J. Himpsel, F. R. McFeely, A. Taleb-Ibrahimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B 38, 6084 (1988).