Chemical tuning of band alignments for metal gate/high- κ oxide interfaces

Physical Review B - Condensed Matter and Materials Physics

Volumn 73, Issue 4, 2006, Pages

  Dong, Y F ^a   Wang, S J ^b   Feng, Y P ^a   Huan, A C H ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33144485586     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.73.045302     Document Type: Article

References (35)

1. The International Technology Roadmap for Semiconductor 2004, URL: http://public.itrs.net
2. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1361065 89, 5243 (2001).
3. S. J. Wang and C. K. Ong, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1467970 80, 2541 (2002).
4. P. W. Peacock and J. Robertson, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.92.057601 92, 057601 (2004).
5. C. J. Först, C. R. Ashman, K. Schwarz, and P. E. Blöchl, Nature (London) NATUAS 0028-0836 10.1038/nature02204 427, 53 (2004).
6. Y. F. Dong, Y. P. Feng, S. J. Wang, and A. C. H. Huan, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.72.045327 72, 045327 (2005).
7. Yee-Chia Yeo, Tsu-Jae King, and Chenming Hu, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1521517 92, 7266 (2002).
8. V. V. Afanas'ev, M. Houssa, A. Stesmans, and M. M. Heyns, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1436299 91, 3079 (2002).
9. Y. F. Dong, S. J. Wang, J. W. Chai, Y. P. Feng, and A. C. H. Huan, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1891285 86, 132103 (2005).
10. Seongjun Park, Luigi Colombo, Yoshio Nishi, and Kyeongjae Cho, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1865349 86, 073118 (2005).
11. I. De, D. Johri, A. Srivastava, and C. M. Osburn, Solid-State Electron. SSELA5 0038-1101 10.1016/S0038-1101(99)00323-8 44, 1077 (2000).
12. A. A. Knizhnik, I. M. Iskandarova, A. A. Bagatur'yants, B. V. Potapkin, and L. R. C. Fonseca, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1861972 97, 064911 (2005).
13. G. Kresse and J. Hafner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.47.558 47, R558 (1993);
14. G. Kresse and J. Hafner, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.48.13115 48, 13115 (1993).
15. G. Kresse and J. Furthmuller, Comput. Mater. Sci. CMMSEM 0927-0256 10.1016/0927-0256(96)00008-0 6, 15 (1996);
16. G. Kresse and J. Furthmuller, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.54.11169 54, 11169 (1996).
17. D. Vanderbilt, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.41.7892 41, R7892 (1990).
18. J. P. Perdew, J. A. Chevary, S. H. Vosko, K. A. Jackson, M. R. Pederson, D. J. Singh, and C. Fiolhais, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.46. 6671 46, 6671 (1992).
19. Peter E. Blöchl, O. Jepsen, and O. K. Andersen, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.49.16223 49, 16223 (1994).
20. S. G. Louie, J. R. Chelikowsky, and M. L. Cohen, Phys. Rev. B PLRBAQ 0556-2805 10.1103/PhysRevB.15.2154 15, 2154 (1977).
21. J. Tersoff, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.52.465 52, 465 (1984).
22. John Robertson, J. Vac. Sci. Technol. B JVTBD9 0734-211X 10.1116/1.591472 18, 1785 (2000).
23. Winfried Mönch, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1866641 86, 122101 (2005).
24. M. Peressi, N. Binggeli, and A. Baldereschi, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/31/11/002 31, 1273 (1998).
25. S. H. Wei and A. Zunger, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.59.144 59, 144 (1987).
26. B. Králik, E. K. Chang, and S. G. Louie, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.57.7027 57, 7027 (1998).
27. V. Fiorentini and G. Gulleri, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.89.266101 89, 266101 (2002).
28. S. J. Wang, A. C. H. Huan, Y. L. Foo, J. W. Chai, J. S. Pan, Q. Li, Y. F. Dong, Y. P. Feng, and C. K. Ong, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1819988 85, 4418 (2004).
29. M. D. Segall, P. L. D. Lindan, M. J. Probert, C. J. Pickard, P. J. Hasnip, S. J. Clark, and M. C. Payne, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/14/11/301 14, 2717 (2002).
30. R. T. Tung, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.84.6078 84, 6078 (2000).
31. D. A. Ricci, T. Miller, and T.-C. Chiang, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.93.136801 93, 136801 (2004).
32. Andreas Eichler and Georg Kresse, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.69.045402 69, 045402 (2004).
33. R. G. Pearson, Inorg. Chem. INOCAJ 0020-1669 10.1021/ic00277a030 27, 734 (1988);
34. R. S. Mulliken, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1749394 2, 782 (1934).
35. H. B. Michaelson, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.323539 48, 4729 (1977).