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Volumn 8, Issue 1, 2001, Pages 39-57
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Perspective paper: First principles modeling of high-k gate dielectrics
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
ELECTRON TUNNELING;
MATHEMATICAL MODELS;
MOSFET DEVICES;
PERMITTIVITY;
PROBABILITY DENSITY FUNCTION;
SILICA;
GATE OXIDES;
STATIC LEAKAGE POWER;
DIELECTRIC MATERIALS;
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EID: 0035737354
PISSN: 09281045
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1015011207910 Document Type: Article |
Times cited : (19)
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References (57)
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