Carbon-based materials: Growth, properties, MEMS/NEMS technologies, and MEM/NEM switches

Critical Reviews in Solid State and Materials Sciences

Volumn 36, Issue 2, 2011, Pages 66-101

  Liao, Meiyong ^a   Koide, Yasuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

actuation; carbon nanotubes; diamond; graphene; micro or nano machining; resonators; RF MEMS; self assembly and manipulation; sensors; suspended structures

Indexed keywords

ACTUATION; NANOMACHINING; RF-MEMS; SELF- ASSEMBLY AND MANIPULATION; SUSPENDED STRUCTURE;

CARBON NANOTUBES; DIAMONDS; GRAPHENE; HYDROPHOBICITY; MATERIALS; MECHANICAL PROPERTIES; MICROWAVE SENSORS; SILICON; SURFACE CHEMISTRY; THERMAL CONDUCTIVITY;

GROWTH (MATERIALS);

EID: 79958243994     PISSN: 10408436     EISSN: 15476561     Source Type: Journal    
DOI: 10.1080/10408436.2011.572748     Document Type: Article

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