Selective nucleation in silicon moulds for diamond MEMS fabrication

Journal of Micromechanics and Microengineering

Volumn 19, Issue 7, 2009, Pages

  Bongrain, Alexandre ^a   Scorsone, Emmanuel ^a   Rousseau, Lionel ^b   Lissorgues, Gälle ^b   Gesset, Céline ^a   Saada, Samuel ^a   Bergonzo, Philippe ^a  

^a DIF   (France)

^b UNIVERSITÉ PARIS EST   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS-ENHANCED NUCLEATION; CONVENTIONAL TECHNIQUES; CRITICAL POINTS; DEVICE FABRICATIONS; DIAMOND GROWTH; MEMS FABRICATION; MEMS-STRUCTURE; NUCLEATION PROCESS; SEEDING TECHNIQUES; SELECTIVE DIAMOND GROWTH; SELECTIVE NUCLEATION; YOUNG MODULUS;

EQUATIONS OF STATE; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MOLDS; NUCLEATION; SILICON WAFERS;

DIAMONDS;

EID: 68249138766     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/7/074015     Document Type: Article

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