DC - 65 GHz characterization of nanocrystalline diamond leaky film for reliable RF MEMS switches

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 581-584

  Chee, Joolien ^a   Karru, Ratnakar ^a   Fisher, Timothy S ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE PROPERTIES;

CHARGE INDUCED STICTION; DC CONDUCTIVITY; DIAMOND LEAKY FILM; POTENTIAL TRAPPED CHARGES;

DIAMOND FILMS;

EID: 33847241494     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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