Diamond surface micromachining technology

Diamond and Related Materials

Volumn 8, Issue 10, 1999, Pages 1834-1837

  Yang, Yirong ^a   Wang, Xiaodong ^a   Ren, Congxin ^a   Xie, Jianfang ^a   Lu, Pingfang ^a   Wang, Weiyuan ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Diamond films; Surface micromachining technology

Indexed keywords

DRY ETCHING; ION BEAMS; MASKS; MICROMACHINING; OXYGEN; SEMICONDUCTING BORON; SEMICONDUCTING DIAMONDS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; SILICON WAFERS; SURFACE TREATMENT;

SURFACE MICROMACHINING TECHNOLOGY; WET ETCHING;

DIAMOND FILMS;

EID: 0032691265     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00117-X     Document Type: Article

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