Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1281-1283

  Arun, A ^a   Acquaviva, D ^a   Fernandez Bolanos M ^a   Salet, P ^a   Le Poche, H ^b   Pantigny, P ^b   Idda, T ^c   Ionescu, A M ^a  

^a EPFL   (Switzerland)

^b CEA GRENOBLE   (France)

^c LAAS CNRS   (France)

Author keywords

Capacitors; Carbon nanotube; Membrane; MEMS; NEMS; Vertically aligned

Indexed keywords

ACTUATION VOLTAGES; BUILDING BLOCKES; CARBON NANOTUBE MEMBRANES; CONDUCTIVE MEMBRANES; DC BIAS; DENSE ARRAYS; DEVICE CAPACITANCE; METAL ELECTRODES; MICRO-ELECTRO-MECHANICAL; MICROELECTROMECHANICAL SYSTEMS; PARALLEL PLATES; PULL-IN; PULL-IN VOLTAGE; S-PARAMETER MEASUREMENTS; VERTICALLY ALIGNED; VERTICALLY ALIGNED CARBON NANOTUBE; YOUNG'S MODULUS;

CAPACITANCE; CAPACITORS; ELECTRODES; ELECTROSTATIC ACTUATORS; MEMBRANES; MEMS; MICROELECTROMECHANICAL DEVICES; SCATTERING PARAMETERS; SMELTING;

CARBON NANOTUBES;

EID: 77149154023     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.10.021     Document Type: Article

References (4)

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