Direct photolithographic route to selective growth of single-walled carbon nanotubes using a modified photoresist with ferrocene

Nanotechnology

Volumn 17, Issue 1, 2006, Pages 116-123

  Min, Yo Sep ^a   Bae, Eun Ju ^a   Park, Jong Bong ^a   Park, Wanjun ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; PHOTOLITHOGRAPHY; PHOTORESISTORS; RAMAN SCATTERING;

NANOPARTICLES; PHOTORESIST; SELECTIVE GROWTH;

CARBON NANOTUBES;

EID: 29144441139     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/17/1/019     Document Type: Article

References (33)

1. Avouris P 2002 Acc. Chem. Res. 35 1026
2. Dai H 2002 Acc. Chem. Res. 35 1035
3. Deng W Q, Xu X and Goddard W A 2004 Nano Lett. 4 2331
4. Kong J, Soh H T, Cassell A M, Quate C F and Dai H 1998 Nature 395 878
5. Cassell A M, Franklin N R, Tombler T W, Chan E M, Han J and Dai H 1999 J. Am. Chem. Soc. 121 7975
6. Ago H, Murata K, Yumura M, Yotani J and Uemura S 2003 Appl. Phys. Lett. 82 811
7. Bae E J, Choi W B, Jeong K S, Chu J U, Park G S, Song S and Yoo I K 2002 Adv. Mater. 14 277
8. Choi H C, Kundaria S, Wang D, Javey A, Wang Q, Rolandi M and Dai H 2003 Nano Lett. 3 157
9. Huang S, Dai L and Mau A W H 2002 Adv. Mater. 14 1140
10. Hinderling C et al 2004 Adv. Mater. 16 876
11. Ishida M, Hongo H, Nihey F and Ochiai Y 2004 Japan. J. Appl. Phys. 43 L1356
12. Wilkinson G, Rosenblum M, Whiting M C and Woodward R B 1952 J. Am. Chem. Soc. 74 2125
13. Zhu H W, Xu C L, Wu D H, Wei B Q, Vajtai R and Ajayan P M 2002 Science 296 884
14. Jeong S H, Ko J H, Park J B and Park W 2004 J. Am. Chem. Soc. 126 15982
15. Tan B J, Klabunde K J and Sherwood P M A 1990 Chem. Mater. 2 186
16. Welsh I D and Sherwood P M A 1989 Phys. Rev. B 40 6386
17. Shabanova I N and Trapeznikov V A 1975 J. Electron Spectrosc. Relat. Phenom. 6 297
18. Reich S, Thomsen C and Maultzsch J 2004 Carbon Nanotubes: Basic Concepts and Physical Properties (Weinheim: Wiley-VCH)
19. Bachilo S M, Strano M S, Kittrell C, Hauge R H, Smalley R E and Weisman R B 2002 Science 298 2361
20. Dresselhaus M S, Dresselhaus G, Jorio A, Souza Fillo A G and Saito R 2002 Carbon 40 2043
21. Kataura H, Kumazawa Y, Maniwa Y, Umezu I, Suzuki S, Ohtsuka Y and Achiba Y 1999 Synth. Met. 103 2555
22. Weisman R B and Bachilo S M 2003 Nano Lett. 3 1235
23. Jorio A, Saito R, Hafner J H, Lieber C M, Hunter M, McClure T, Dresselhaus G and Dresselhaus M S 2001 Phys. Rev. Lett. 86 1118
24. Homma Y, Kobayashi Y, Ogino T, Takagi D, Ito R, Jung Y and Ajayan P M 2003 J. Phys. Chem. B 107 12161
25. Hou H, Schaper A K, Jun Z, Weller F and Greiner A 2003 Chem. Mater. 15 580
26. Jin-Phillipp N Y and Ruhle M 2004 Phys. Rev. B 70 245421
27. Jung Y J, Wei B, Vajtai R, Ajayan P M, Homma Y, Prabhakaran K and Ogino T 2003 Nano Lett. 3 561
28. Jung Y J, Homma Y, Ogino T, Kobayashi Y, Takagi D, Wei B, Vajtai R and Ajayan P M 2003 J. Phys. Chem. B 107 6859
29. Li Y, Kim W, Zhang Y, Rolandi M, Wang D and Dai H 2001 J. Phys. Chem. B 105 11424
30. Cheung C, L, Kurtz A, Park H and Lieber C M 2002 J. Phys. Chem. B 106 2429
31. Han S, Yu T, Park J, Koo B, Joo J, Hyeon T, Hong S and Im J 2004 J. Phys. Chem. B 108 8091
32. Hata K, Futaba D N, Mizuno K, Namai T, Yumura M and Iijima S 2004 Science 306 1362
33. Farmer D B and Gordon R G 2005 Electrochem. Solid State Lett. 8 G89