Contact voltage-induced softening of RF microelectromechanical system gold-on-gold contacts at cryogenic temperatures

Journal of Applied Physics

Volumn 108, Issue 4, 2010, Pages

  Berman, D ^a   Walker, M J ^b   Krim, J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVE FAILURE; ADSORBED FILMS; ADSORBED SPECIES; CONTACT CURRENTS; CONTACT TEMPERATURE; CONTACT VOLTAGE; CRYOGENIC TEMPERATURES; GOLD CONTACTS; HEATING MODELS; HIGH TEMPERATURE; IN-SITU; IN-VACUUM; OXYGEN PLASMAS; RF MICROELECTROMECHANICAL SYSTEMS; RF MICROMECHANICAL SYSTEMS; SOFTENING EFFECT; SWITCH CONTACTS; TEMPERATURE RANGE;

CRYOGENICS; HEATING; IMPACT RESISTANCE; MEMS; MICROELECTROMECHANICAL DEVICES; OXYGEN; THERMOELECTRICITY;

GOLD;

EID: 77956328229     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3459893     Document Type: Conference Paper

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