Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Liao, Meiyong ^a   Li, Chun ^a   Hishita, Shunichi ^a   Koide, Yasuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; BATCH FABRICATION; BATCH PRODUCTION; HIGH QUALITY SINGLE CRYSTALS; MECHANICAL OPERATIONS; MEMSDEVICES; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; NANOCRYSTALLINE FILMS; OPTICAL READOUT; PIEZOELECTRIC ACTUATION; POLYCRYSTALLINE; RESONANT VIBRATIONS; SINGLE CRYSTAL DIAMOND; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; MECHANICAL PROPERTIES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; NANOINDENTATION; SINGLE CRYSTALS;

DIAMONDS;

EID: 77957846608     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085002     Document Type: Article

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