Batch fabrication of nanotubes suspended between microelectrodes

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1431-1435

  Mateiu, Ramona ^a,b   Stöckli, Thomas ^c   Knapp, Helmut F ^c   Keles, Yanki ^c   Bøggild, Peter ^b   Boisen, Anja ^b  

^a SCF Technologies AS   (Denmark)

^b TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^c CSEM   (Switzerland)

Author keywords

Nanotube based NEMS; Nanotube bridges; Single walled CNTs

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRIC FIELD EFFECTS; MICROELECTRODES; NEMS; PHOTOLITHOGRAPHY;

GATE MICROELECTRODES; NANOTUBE BASED NEMS; NANOTUBE BRIDGES; STANDARD CLEANROOM PROCESSES;

SINGLE-WALLED CARBON NANOTUBES (SWCN);

EID: 34247554930     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.230     Document Type: Article

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