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Volumn 14, Issue 3-7, 2005, Pages 657-660
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Pressure sensor using p-type polycrystalline diamond piezoresistors
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Author keywords
Hot filament CVD; p Type doping; Sensors; Strain
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DOPING (ADDITIVES);
PIEZOELECTRIC DEVICES;
POLYCRYSTALLINE MATERIALS;
PRESSURE MEASUREMENT;
RESISTORS;
SENSORS;
STRAIN;
HOT FILAMENT CVD;
P-TYPE DOPING;
PIEZORESISTORS;
POLYCRYSTALLINE DIAMOND;
DIAMONDS;
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EID: 18444402518
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2004.09.001 Document Type: Conference Paper |
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Times cited : (21)
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References (11)
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